Synthetic complex superresolving pupil filter based on double-beam phase modulation

被引：4

作者：

Liu, Jian ^{[1
]}

Tan, Jiubin ^{[1
]}

Wang, Yanchao ^{[1
]}

机构：

[1] Harbin Inst Technol, Ultr Precis Optoelect Instrument Engn Inst, Harbin 150001, Peoples R China

来源：

APPLIED OPTICS | 2008年 / 47卷 / 21期

关键词：

D O I：

10.1364/AO.47.003803

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

To take advantage of phase-only filters to reduce reflected stray light, two phase plates are used in a synthetic complex superresolving pupil filter to get a small spot for laser direct writing. The amplitude modulation in a conventional complex superresolving pupil filter (CCSPF) is substituted by an equivalent phase modulation. The equivalence between the proposed filter and a CCSPF is established for a general design. The effectiveness of the proposed filter was proven through experiments to obtain a small main lobe width of 0.86 times the size of the airy spot. (C) 2008 Optical Society of America.

引用

页码：3803 / 3807

页数：5

共 12 条

[1] Design of superresolving continuous phase filters [J].

de Juana, DM ;

Oti, JE ;

Canales, VF ;

Cagigal, MP .

OPTICS LETTERS, 2003, 28 (08) :607-609

[2] Superspeckles: a new application of optical superresolution [J].

Gundu, PN ;

Hack, E ;

Rastogi, P .

OPTICS EXPRESS, 2005, 13 (17) :6468-6475

[3] High efficient superresolution combination filter with twin LCD spatial light modulators [J].

Gundu, PN ;

Hack, E ;

Rastogi, P .

OPTICS EXPRESS, 2005, 13 (08) :2835-2842

[4] Comparison of superresolution effects with annular phase and amplitude filters [J].

Luo, HX ;

Zhou, CH .

APPLIED OPTICS, 2004, 43 (34) :6242-6247

[5] Three-dimensional superresolution by annular binary filters [J].

Martínez-Corral, M ;

Andrés, P ;

Zapata-Rodríguez, CJ ;

Kowalczyk, M .

OPTICS COMMUNICATIONS, 1999, 165 (4-6) :267-278

[6] Diffractive superresolution elements [J].

Sales, TRM ;

Morris, GM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1997, 14 (07) :1637-1646

[7]

SEIRACKI CK, 1994, P SOC PHOTO-OPT INS, V2184, P120

[8]

SHEPPARD CJR, 1977, OPTIK, V48, P329

[9] Fundamentals of superresolution [J].

Sheppard, Colin J. R. .

MICRON, 2007, 38 (02) :165-169

[10] HIGH-DENSITY RECORDING BY SUPERRESOLUTION IN AN OPTICAL DISK MEMORY SYSTEM [J].

YAMANAKA, Y ;

HIROSE, Y ;

FUJII, H ;

KUBOTA, K .

APPLIED OPTICS, 1990, 29 (20) :3046-3051

← 1 2 →