0.69 nm resolution ultrasonic motor for large stroke precision stage

被引：15

作者：

Egashira, Y ^{[1
]}

Kosaka, K ^{[1
]}

Takada, S ^{[1
]}

Iwabuchi, T ^{[1
]}

Baba, T ^{[1
]}

Moriyama, S ^{[1
]}

Harada, T ^{[1
]}

Nagamoto, K ^{[1
]}

Nakada, A ^{[1
]}

Kubota, H ^{[1
]}

Ohmi, T ^{[1
]}

机构：

[1] Kumamoto Univ, Grad Sch Sci & Technol, Kumamoto 8608555, Japan

来源：

PROCEEDINGS OF THE 2001 1ST IEEE CONFERENCE ON NANOTECHNOLOGY | 2001年

关键词：

D O I：

10.1109/NANO.2001.966455

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This study reports the application of the non-resonant type ultrasonic motor (NRUSM) to a 300 mm-stroke ultra-precision stage for the future nano-electronics manufacturing. The advantages of the NRUSM are high resolution and no magnetic noise generation due to the DC characteristics of the piezoelectric device, and high servo rigidity and no additional brake mechanism needed due to direct drive mechanism. It is confirmed that the NRUSM is suitable for ultra-precision positioning, slow and high velocity feeding at closed-loop control. The NRUSM driven stage performance results are; (1) maximum velocity 50 mm/s over the 300 mm-stroke at open-loop control; (2) positioning accuracy of +/-0.69 nm at step and repeat response, and position accuracy at constant velocity feeding 10 nm/s similar to 36 mm/s below 20 nm at closed-loop control.

引用

页码：397 / 402

页数：6

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