Amorphous and crystallized Ge-Sb-Te thin films deposited by pulsed laser: Local structure using Raman scattering spectroscopy

被引:122
作者
Nemec, P. [1 ]
Nazabal, V. [1 ,2 ]
Moreac, A. [3 ]
Gutwirth, J. [4 ]
Benes, L. [5 ]
Frumar, M.
机构
[1] Univ Pardubice, Dept Graph Arts & Photophys, Fac Chem Technol, Pardubice 53210, Czech Republic
[2] Univ Rennes 1, Equipe Verres & Ceram, UMR CNRS 6226, F-35042 Rennes, France
[3] Univ Rennes 1, Inst Phys Rennes, UMR CNRS 6251, F-35042 Rennes, France
[4] Univ Pardubice, Dept Gen & Inorgan Chem, Fac Chem Technol, Pardubice 53210, Czech Republic
[5] Inst Macromol Chem AS CR, Joint Lab Solid State Chem, Vvi, Pardubice 53210, Czech Republic
关键词
Thin films; Chalcogenides; Vacuum deposition; Raman spectroscopy and scattering; PHASE-CHANGE MATERIALS; GE2SB2TE5; FILMS; DATA-STORAGE; MEMORY; MICROSCOPES; MECHANISM; SPECTRA; DEVICES; SYSTEM;
D O I
10.1016/j.matchemphys.2012.08.024
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
UV pulsed laser deposition was employed for the fabrication of amorphous (GeTe)(x)(Sb2Te3)(1) (x). (x - 1, 0.66, 0.5, 0.33, and 0) thin films. The local structure of as-deposited (amorphous) as well as annealed (crystallized) layers was studied using Raman scattering spectroscopy. Raman spectra were recorded on bulk materials used for the deposition as well. The vibrational modes observed in amorphous Ge-Sb-Te films are attributed, apart from defective octahedral coordination, to GeTe4 Ge-n(n) (n = 1, 2, eventually 0) corner- and/or edge-sharing tetrahedra and SbTe3 pyramidal entities, the latter dominated Raman spectra of all the films containing Sb2Te3. The structure of crystallized GeTe and Sb2Te3 resembled that of starting bulk materials which is evidenced by the presence of Gamma(3) (E) and Gamma(1) (A(1)) modes of rhombohedrally deformed rocksalt GeTe and E-g (2) and A(1g) (2) modes of hexagonal Sb2Te3. We propose that in case of crystallized Ge2Sb2Te5, Ge1Sb2Te4, and Ge1Sb4Te2 films, Raman active features might be attributed to defective octahedral local structure and/or softened A, mode of corner-sharing GeTe4 tetrahedra, A(1) mode of corner-sharing GeTe4 Ge-n(n) (n = 1,2) tetrahedra, GeTe4F2 mode, Sb-Te mode in SbTe3 entities, eventually E-g (2) and A(1g) (2) modes of hexagonal Sb2Te3. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码:935 / 941
页数:7
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