Fabrication and analysis of a micro-machined tri-axis gyroscope

This paper presents an innovative micro-gyroscope design. Solely by SOI ( silicon on insulator) fabrication technology and wet etching, the proposed micro-gyroscope can be produced in batch and is capable of detecting three-axis angular rates. The induced motions of all individual seismic mass modules are designed to respond in the directions orthogonal to each other in order to decouple the obtained measurements. In our work, three pairs of high-resolution differential capacitors with signal processing circuits are employed to measure the angular velocity components in three axes. On the other hand, the drive electrode comb is used to constantly vibrate the outer-ring in the tangential direction by a sinusoidal voltage. The signal bandwidth is increased by distributed translational proof masses (DTPM), placed 90. apart orderly. Each individual proof mass of DTPM is designed with natural frequency discrepancy and constrained to move in the radial direction so that the superior mode matching can be easily, to some extent, achieved. The suspension flexures are particularly designed to resist planar displacements in the drive mode but increase the stroke of tilting angular displacement in the sense mode. By considering the complicated geometry of the suspension flexures, FEM ( finite element method) is employed to examine the potential maximum induced mechanical stress. The dynamic equations of the proposed gyroscope are established so that the embedded gyroscopic effects are explicitly unveiled. More importantly, the efficacy of the drive and sense circuit modules are verified by commercial softwares Hspice and Multisim. By intensive computer simulations and preliminary experimental studies, the resolution, bandwidth and decoupling capability of the tri-axis gyroscope are expected to be fairly enhanced if a certain degree of trade-off is preset.