共 50 条
- [2] Atomic layer deposition of hafnium oxide from tetrakis(ethylmethylamino)hafnium and water precursors JOURNAL OF PHYSICAL CHEMISTRY C, 2007, 111 (17): : 6495 - 6499
- [5] Atomic layer deposition of hafnium oxide dielectrics on silicon and germanium substrates Journal of Materials Science: Materials in Electronics, 2008, 19 : 119 - 123
- [6] Preparation of Hafnium Oxide Thin Films grown by Atomic Layer Deposition KOREAN JOURNAL OF MATERIALS RESEARCH, 2005, 15 (04): : 275 - 280
- [7] Atomic layer deposition of hafnium oxide and hafnium silicate thin films using liquid precursors and ozone JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2004, 22 (04): : 1175 - 1181
- [10] Atomic layer deposition of hafnium oxide from hafnium chloride and water Journal of the American Chemical Society, 2008, 130 (36): : 11996 - 12006