Structure and dielectric properties of sputtered bismuth magnesium niobate thin films

被引：35

作者：

Gao, Libin ^{[1
]}

Jiang, Shuwen ^{[1
]}

Li, Ruguan ^{[1
]}

Li, Bin ^{[1
]}

Li, Yanrong ^{[1
]}

机构：

[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China

来源：

THIN SOLID FILMS | 2012年 / 520卷 / 19期

基金：

中国国家自然科学基金;

关键词：

Cubic pyrochlore films; Bi1.5MgNb1.5O7 thin films; Tunability; Dielectric dispersion; Sputter deposition; Low loss tangent; PULSED-LASER DEPOSITION; PYROCHLORE; MICROWAVE; CERAMICS; RELAXATION;

D O I：

10.1016/j.tsf.2012.06.035

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The Bi1.5MgNb1.5O7 (BMN) thin films were prepared on platinum coated sapphire by rf magnetron sputter deposition. Effects of substrate temperature, sputter pressure and O-2/(O-2 + Ar) mixing ratio on phase structures and dielectric properties of thin films were investigated. The results indicated that sufficiently high substrate temperature and low sputter pressure would facilitate the formation of cubic pyrochlore in BMN thin films. Meanwhile, the appropriate O-2/(O-2 + Ar) mixing ratio of sputter atmosphere was required. The deposited Bi1.5MgNb1.5O7 cubic pyrochlore thin films with (222) oriented texture exhibited large tunability of similar to 50% at a maximum applied bias field of 1.5 MV/cm, with low dielectric loss of similar to 0.007. The temperature and frequency dependent dielectric measurements indicated that no noticeable dielectric dispersion was detected in BMN cubic pyrochlore thin films. (C) 2012 Elsevier B. V. All rights reserved.

引用

页码：6295 / 6298

页数：4

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