Electrical resistivity and elastic wave propagation anisotropy in glancing angle deposited tungsten and gold thin films

被引:25
作者
El Beainou, Raya [1 ]
Chargui, Asma [1 ]
Pedrosa, Paulo [2 ]
Mosset, Alexis [1 ]
Euphrasie, Sebastien [1 ]
Vairac, Pascal [1 ]
Martin, Nicolas [1 ]
机构
[1] Univ Bourgogne Franche Comte, ENSMM, CNRS, Inst FEMTO ST,UMR 6174, 15B,Ave Montboucons, F-25030 Besancon, France
[2] Univ Minho, Ctr Fis, Campus Gualtar, Braga, Portugal
关键词
Glancing angle deposition; Tungsten; Gold; Columnar films; Surface acoustic wave; Resistivity; Anisotropy; OPTICAL-PROPERTIES; ZONE MODEL; GROWTH; MICROSTRUCTURE; NANOSTRUCTURES; PRESSURE; MODIFY;
D O I
10.1016/j.apsusc.2019.01.041
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We report on experimental investigations of electrical resistivity and surface elastic wave propagation in W and Au thin films sputter-deposited by glancing angle deposition. For both metals, the angle of deposition alpha is systematically changed from 0 to 85 degrees. Dense and compact films are produced with a normal incident angle alpha = 0 degrees, whereas inclined and porous columnar architectures are clearly obtained for the highest angles. Group velocities and DC electrical resistivities of W and Au films are significantly changed in x and y directions as alpha increases from 0 to 85 degrees. Isotropic behaviors are always observed for Au films, whereas anisotropic velocity and resistivity are clearly measured in W films prepared with incident angles higher than 60 degrees. The anisotropic coefficient reaches 1.8 for velocity and 2.0 for resistivity in W films, while it remains in-between 1.0 and 1.2 in Au films whatever the incident angle. This directional dependence of electrical resistivity and elastic wave propagation is connected to the anisotropic structural characteristics of W inclined columns (fanning of their cross-section), while Au columns exhibit a more symmetric growth as a function of the incident angle.
引用
收藏
页码:606 / 614
页数:9
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