Reliability aspects of a radiation detector fabricated by post-processing a standard CMOS chip

被引：7

作者：

Salm, Cora ^{[1
]}

Carballo, Victor M. Blanco ^{[1
]}

Melai, Joost ^{[1
]}

Schmitz, Jurriaan ^{[1
]}

机构：

[1] Univ Twente, MESA Inst Nanotechnol, Semicond Components Grp, NL-7500 AE Enschede, Netherlands

来源：

MICROELECTRONICS RELIABILITY | 2008年 / 48卷 / 8-9期

关键词：

D O I：

10.1016/j.microrel.2008.06.038

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes various reliability concerns of the newly developed INGRID detector. This radiation detector is fabricated by waferscale CMOS post-processing; fresh detectors show excellent performance. Since the microsystems will be used unpackaged they are susceptible to all kinds of environmental conditions. The device passed tests of micro-ESD, radiation hardness, dielectric strength: but humidity tests show one weakness of SU-8 as a Structural material. Already after I day of exposure to a humid condition the structural integrity, as measured by a shear stress test, is dramatically lowered. Dry storage of these devices is therefore a necessity. KMPR photoresist shows promising results as an alternative structural material. (c) 2008 Elsevier Ltd. All rights reserved.

引用

页码：1139 / 1143

页数：5

共 11 条

[1]

Aarts AA, 2006, IEEE NUCL SCI CONF R, P3865

[2] Reading a GEM with a VLSI pixel ASIC used as a direct charge collecting anode [J].

Bellazzini, R ;

Angelini, F ;

Baldini, L ;

Bitti, F ;

Brez, A ;

Ceccanti, M ;

Latronico, L ;

Massai, MM ;

Minuti, M ;

Omodei, N ;

Razzano, M ;

Sgrò, C ;

Spandre, G ;

Costa, E ;

Soffitta, P .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2004, 535 (1-2) :477-484

[3] A radiation imaging, detector made by postprocessing a standard CMOS chip [J].

Carballo, Victor Manuel Blanco ;

Chefdeville, Maximilien ;

Fransen, Martin ;

van der Graaf, Harry ;

Melai, Joost ;

Salm, Cora ;

Schmitz, Jurriaan ;

Timmermans, Jan .

IEEE ELECTRON DEVICE LETTERS, 2008, 29 (06) :585-587

[4] The readout of a GEM or Micromegas-equipped TPC by means of the Medipix2 CMOS sensor as direct anode [J].

Colas, P ;

Colijn, AP ;

Fornaini, A ;

Giomataris, Y ;

van der Graaf, H ;

Heijne, EHM ;

Llopart, X ;

Schmitz, J ;

Timmermans, J ;

Visschers, JL .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2004, 535 (1-2) :506-510

[5] Influence of processing conditions on the thermal and mechanical properties of SU8 negative photoresist coatings [J].

Feng, R ;

Farris, RJ .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2003, 13 (01) :80-88

[6] On the radiation tolerance of SU-8, a new material for gaseous microstructure radiation detector fabrication [J].

Key, MJ ;

Cindro, V ;

Lozano, M .

RADIATION PHYSICS AND CHEMISTRY, 2004, 71 (05) :1003-1007

[7] Fabrication of thick electroforming micro mould using a KMPR negative tone photoresist [J].

Lee, C. H. ;

Jiang, K. .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2008, 18 (05)

[8] SU-8: a low-cost negative resist for MEMS [J].

Lorenz, H ;

Despont, M ;

Fahrni, N ;

LaBianca, N ;

Renaud, P ;

Vettiger, P .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1997, 7 (03) :121-124

[9] Remotely adjustable check-valves with an electrochemical release mechanism for implantable biomedical microsystems [J].

Pan, Tingrui ;

Baldi, Antonio ;

Ziaie, Babak .

BIOMEDICAL MICRODEVICES, 2007, 9 (03) :385-394

[10]

Reather H., 1964, ELECT AVALANCHES BRE

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