Preparation and electrical properties of (Zr,Sn)TiO4 dielectric thin films by laser ablation

被引:0
|
作者
Nakagawara, O [1 ]
Tabata, H [1 ]
Toyota, Y [1 ]
Kobayashi, M [1 ]
Yoshino, Y [1 ]
Katayama, Y [1 ]
Kawai, T [1 ]
机构
[1] MURATA MFG CO LTD,KYOTO 617,JAPAN
来源
EPITAXIAL OXIDE THIN FILMS II | 1996年 / 401卷
关键词
D O I
暂无
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
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页码:97 / 102
页数:6
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