Micropatterning of titanium dioxide on self-assembled monolayers using a liquid-phase deposition process

被引：166
作者：
Koumoto, K [1 ]
Seo, S
Sugiyama, T
Seo, WS
Dressick, WJ
机构：
[1] Nagoya Univ, Grad Sch Engn, Dept Appl Chem, Nagoya, Aichi 4648603, Japan
[2] USN, Res Lab, Ctr Biomol Sci & Engn, Washington, DC 20375 USA
来源：
CHEMISTRY OF MATERIALS | 1999年 / 11卷 / 09期
关键词：
D O I：
10.1021/cm990223s
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The fabrication of micropatterned TiO2 films on deep UV patterned self-assembled monolayers (SAMs) of phenylsiloxane is described. The patterned SAM was immersed in an acidic, aqueous TiF62- solution to directly deposit crystalline TiO2 (anatase) onto both hydrophobic (masked) and hydrophilic (irradiated) surface regions without the need for postdeposition heat curing. Subsequent sonication selectively removed weakly bound TiO2 present in the hydrophobic regions, resulting in a micropatterned TiO2 thin film.
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收藏
页码：2305 / +
页数：6
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共 64 条
  • [1] Ion beam modification and patterning of organosilane self-assembled monolayers
    Ada, ET
    Hanley, L
    Etchin, S
    Melngailis, J
    Dressick, WJ
    Chen, MS
    Calvert, JM
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (06): : 2189 - 2196
  • [2] Modified calcite deposition due to ultrathin organic films on silicon substrates
    Archibald, DD
    Qadri, SB
    Gaber, BP
    [J]. LANGMUIR, 1996, 12 (02) : 538 - 546
  • [3] FABRICATION OF SURFACES RESISTANT TO PROTEIN ADSORPTION AND APPLICATION TO 2-DIMENSIONAL PROTEIN PATTERNING
    BHATIA, SK
    TEIXEIRA, JL
    ANDERSON, M
    SHRIVERLAKE, LC
    CALVERT, JM
    GEORGER, JH
    HICKMAN, JJ
    DULCEY, CS
    SCHOEN, PE
    LIGLER, FS
    [J]. ANALYTICAL BIOCHEMISTRY, 1993, 208 (01) : 197 - 205
  • [4] Size-controlled colloidal Pd(II) catalysts for electroless Ni deposition in nanolithography applications
    Brandow, SL
    Chen, MS
    Wang, T
    Dulcey, CS
    Calvert, JM
    Bohland, JF
    Calabrese, GS
    Dressick, WJ
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1997, 144 (10) : 3425 - 3434
  • [5] Metal pattern fabrication using the local electric field of a conducting atomic force microscope probe
    Brandow, SL
    Calvert, JM
    Snow, ES
    Campbell, PM
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1997, 15 (03): : 1455 - 1459
  • [6] THE MORPHOLOGY OF ELECTROLESS NI DEPOSITION ON A COLLOIDAL PD(II) CATALYST
    BRANDOW, SL
    DRESSICK, WJ
    MARRIAN, CRK
    CHOW, GM
    CALVERT, JM
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1995, 142 (07) : 2233 - 2243
  • [7] Direct extraction of the electron tunneling effective mass in ultrathin SiO2
    Brar, B
    Wilk, GD
    Seabaugh, AC
    [J]. APPLIED PHYSICS LETTERS, 1996, 69 (18) : 2728 - 2730
  • [8] MOSFET transistors fabricated with high permitivity TiO2 dielectrics
    Campbell, SA
    Gilmer, DC
    Wang, XC
    Hsieh, MT
    Kim, HS
    Gladfelter, WL
    Yan, JH
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1997, 44 (01) : 104 - 109
  • [9] Fabrication of patterned DNA surfaces
    Chrisey, LA
    OFerrall, CE
    Spargo, BJ
    Dulcey, CS
    Calvert, JM
    [J]. NUCLEIC ACIDS RESEARCH, 1996, 24 (15) : 3040 - 3047
  • [10] Monolayer-mediated deposition of tantalum(V) oxide thin film structures from solution precursors
    Clem, PG
    Jeon, NL
    Nuzzo, RG
    Payne, DA
    [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1997, 80 (11) : 2821 - 2827
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