Micropatterning of titanium dioxide on self-assembled monolayers using a liquid-phase deposition process

被引：166

作者：

Koumoto, K ^{[1
]}

Seo, S

Sugiyama, T

Seo, WS

Dressick, WJ

机构：

[1] Nagoya Univ, Grad Sch Engn, Dept Appl Chem, Nagoya, Aichi 4648603, Japan

[2] USN, Res Lab, Ctr Biomol Sci & Engn, Washington, DC 20375 USA

来源：

CHEMISTRY OF MATERIALS | 1999年 / 11卷 / 09期

关键词：

D O I：

10.1021/cm990223s

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The fabrication of micropatterned TiO2 films on deep UV patterned self-assembled monolayers (SAMs) of phenylsiloxane is described. The patterned SAM was immersed in an acidic, aqueous TiF62- solution to directly deposit crystalline TiO2 (anatase) onto both hydrophobic (masked) and hydrophilic (irradiated) surface regions without the need for postdeposition heat curing. Subsequent sonication selectively removed weakly bound TiO2 present in the hydrophobic regions, resulting in a micropatterned TiO2 thin film.

引用

页码：2305 / +

页数：6

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