Effect of heating on the residual stresses in TiN films investigated using synchrotron radiation

被引：9

作者：

Matsue, Tatsuya ^{[1
]}

Hanabusa, Takao ^{[2
]}

Kusaka, Kazuya ^{[2
]}

Sakatac, Osami ^{[3
]}

机构：

[1] Niihama Natl Coll Technol, Niihama 7928580, Japan

[2] Univ Tokushima, Fac Engn, Tokushima 7708506, Japan

[3] Japan Synchrotron Radiat Res Inst, Sayo, Hyogo 6795198, Japan

来源：

VACUUM | 2008年 / 83卷 / 03期

关键词：

TiN film; Arc ion plating; Crystal structure; Residual stress; Surface morphology; Synchrotron radiation;

D O I：

10.1016/j.vacuum.2008.04.068

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The structure and residual stresses of TiN films deposited by arc ion plating (AIP) on a steel substrate were investigated using a synchrotron radiation system that emits ultra-intense X-rays. In a previous study, the crystal structures of TiN films deposited by AIP were found to be strongly influenced by the bias voltage. When high bias voltages were used, TiN films that were approximately 200 nm thickness had a preferred orientation of {110}, whereas TiN films that were approximately 600 nm thickness has a multilayer Him orientation of {111}/{110}. In this present study, the two-tilt method was used to evaluate the residual stresses in TiN films by measuring lattice strains in two directions determined by the crystal orientation. Residual stresses in 600-nm-thick as-deposited TiN films were found to be -10.0 GPa and -8.0 GPa for {111}- and {110}-textured layers, respectively, while they were -8.0 GPa for {110}-textured layers in 200-nm-thick as-deposited TiN films. Residual stresses of both films relaxed to thermal stress levels upon annealing. (C) 2008 Elsevier Ltd. All rights reserved.

引用

页码：585 / 588

页数：4

共 12 条

[1]

CHANG TP, 1992, SURF COAT TECH, V55, P490

[2]

CULLITY BD, 1978, ELEMENTS XRAY DIFFRA, P69

[3] Evaluation of internal stresses in single-, double- and multi-layered TiN and TiAIN thin films by synchrotron radiation [J].