The effects of annealing temperature and sputtering power on the structure and magnetic properties of the Co-Fe-Zr-B thin films

被引：7

作者：

Chen, Guo-Ju ^{[1
]}

Jian, Sheng-Rui ^{[1
]}

Jang, Jason Shian-Ching ^{[2
]}

Shih, Yung-Hui ^{[1
]}

Chen, Yuan-Tsung ^{[1
]}

Jen, Shien-Uang ^{[3
]}

Juang, Jenh-Yih ^{[4
]}

机构：

[1] I Shou Univ, Dept Mat Sci & Engn, Kaohsiung 840, Taiwan

[2] Natl Cent Univ, Dept Mech Engn, Inst Mat Sci & Engn, Chungli 320, Taiwan

[3] Acad Sinica, Inst Phys, Taipei 115, Taiwan

[4] Natl Chiao Tung Univ, Dept Electrophys, Hsinchu 300, Taiwan

来源：

INTERMETALLICS | 2012年 / 30卷

关键词：

Glasses; metallic; Calorimetry; Thermal stability; Microscopy; Magnetic properties;

D O I：

10.1016/j.intermet.2012.03.017

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The microstructure and magnetic properties of the amorphous Co-Fe-Zr-B thin films grown on glass substrates by dc magnetron sputtering are investigated using differential scanning calorimetry (DSC), transmission electron microscopy (TEM), and superconducting quantum interference device (SQUID) techniques. The Co-Fe-Zr-B thin films deposited at room temperature were annealed at temperatures ranged from 683 K to 773 K. Experimental results indicated that the coercivity (H-c) of the Co-Fe-Zr-B thin films is significantly influenced by residual stress and crystalline phases within the films. The correlation of the coercivity and the microstructure of Co-Fe-Zr-B thin films are discussed. After annealed at 683 K, the coercivity of the Co-Fe-Zr-B film was as low as 1.2 Oe. (C) 2012 Elsevier Ltd. All rights reserved.

引用

页码：127 / 131

页数：5

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