Robust infrared filters for X-ray spectroscopy

被引：3

作者：

Miller, NA ^{[1
]}

Ullom, JN ^{[1
]}

Beall, JA ^{[1
]}

Hilton, GC ^{[1
]}

Deiker, S ^{[1
]}

Doriese, WB ^{[1
]}

Irwin, KD ^{[1
]}

Reintsema, CD ^{[1
]}

Xu, Y ^{[1
]}

机构：

[1] NIST, Boulder, CO 80305 USA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2004年 / 520卷 / 1-3期

关键词：

infrared filters; X-ray spectroscopy; X-ray windows;

D O I：

10.1016/j.nima.2003.11.364

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

One challenge to using cryogenic detectors for X-ray spectroscopy on a scanning electron microscope is the implementation of infrared blocking filters. In order to achieve high X-ray transmission, these filters can be as thin as 250 nm and consequently are extremely fragile. To avoid breaking the filters, the cryostat must be evacuated slowly and by a trained operator. In this presentation, we describe the filter system currently used at NIST. In addition, we describe recent efforts to build a more robust and easy-to-use filter system. We present initial efforts to strengthen conventional aluminum-parylene filters with micromachined silicon grids that only reduce X-ray transmission by 2%. We also describe an automated pump-out system based on a commercial mass-flow controller. Published by Elsevier B.V.

引用

页码：638 / 640

页数：3