A study of monitoring hydrogen using mesoporous TiO2 synthesized by anodization

被引：17

作者：

Moon, Jongyun ^{[1
]}

Hedman, Hannu-Pekka ^{[1
]}

Kemell, Marianna ^{[2
]}

Suominen, Arho ^{[1
]}

Makila, Ermei ^{[3
]}

Kim, Hong ^{[4
]}

Tuominen, Aulis ^{[5
]}

Punkkinen, Risto ^{[1
]}

机构：

[1] Univ Turku, Dept Informat Technol, FI-20014 Turku, Finland

[2] Univ Helsinki, Dept Chem, FI-00014 Helsinki, Finland

[3] Univ Turku, Dept Phys, FI-20014 Turku, Finland

[4] Hoseo Univ, Dept Safety & Hlth Engn, Asan 337850, South Korea

[5] Univ Turku, FI-20014 Turku, Finland

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2013年 / 189卷

关键词：

TiO2; Anodization; Hydrogen; Gas sensor; OXIDE-FILMS; SENSOR;

D O I：

10.1016/j.snb.2013.05.070

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

We present a hydrogen sensor using mesoporous TiO2 film on silicon and its H-2 sensing properties at different conditions. The sensor was formed by anodizing a sputtered Ti layer on silicon and having it annealed for crystallization. The material and electrical characterization included a study of morphology (FESEM), elemental composition (EDS), crystalline structure (XRD) and current-voltage behavior (semiconductor parameter analyzer). The sensor with Pt electrodes showed promising hydrogen sensing properties in air, such as good response to low hydrogen concentration (20-1000 ppm), fast response time of 5 s and recovery time of 125 s at 1000 ppm. The sensor response is shown to be independent toward relative humidity in the testing atmosphere. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：246 / 250

页数：5

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