A method for measuring the specular X-ray reflectivity with millisecond time resolution

被引:8
|
作者
Voegeli, Wolfgang [1 ]
Matsushita, Tadashi [1 ]
Arakawa, Etsuo [2 ]
Shirasawa, Tetsuroh [3 ]
Takahashi, Toshio [3 ]
Yano, Yohko F. [4 ]
机构
[1] Natl Lab High Energy Phys, KEK, Photon Factory, Inst Mat Struct Sci, Tsukuba, Ibaraki 305, Japan
[2] Tokyo Gakugei Univ, Dept Phys, Tokyo, Japan
[3] Univ Tokyo, Inst Solid State Phys, Tokyo 1138654, Japan
[4] Kinki Univ, Dept Phys, Higashiosaka, Osaka 577, Japan
来源
11TH INTERNATIONAL CONFERENCE ON SYNCHROTRON RADIATION INSTRUMENTATION (SRI 2012) | 2013年 / 425卷
基金
日本科学技术振兴机构;
关键词
RAY; REFLECTOMETRY;
D O I
10.1088/1742-6596/425/9/092003
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A method for quick measurement of the specular X-ray reflectivity using a tapered undulator source is described. It uses a convergent X-ray beam with a one-to-one correspondence between X-ray energy and direction, which is produced by diffraction of a white X-ray beam at a curved silicon crystal. To increase the momentum transfer range, the sample is rotated 45 degrees from the horizontal around the incident beam direction, so that both the X-ray energy and the incident angle change continuously with direction. The specularly reflected beam is observed with a two-dimensional detector. The X-ray reflectivity curve in a wide momentum transfer range can be observed in a single detector exposure with a time resolution in the millisecond range. Test measurements were done for a commercial silicon wafer and a gold thin film on silicon.
引用
收藏
页数:4
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