Temperature effects in tuning fork enhanced interferometric photoacoustic spectroscopy

被引:22
作者
Koehring, M. [1 ]
Boettger, S. [1 ]
Willer, U. [2 ]
Schade, W. [1 ,2 ]
机构
[1] Fraunhofer Heinrich Hertz Inst, D-38640 Goslar, Germany
[2] Tech Univ Clausthal, Inst Energy Res & Phys Technol, D-38640 Goslar, Germany
关键词
YOUNGS MODULUS; POISSONS RATIO; DEPENDENCE; SILICON; SENSOR; LASERS;
D O I
10.1364/OE.21.020911
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Temperature dependent measurements with a compact fiber coupled sensor for trace gas detection in the near-infrared based on tuning fork enhanced interferometric photoacoustic spectroscopy are presented. The temperature effects on the sensor have been investigated in a range from T = -41 degrees C to T = 107 degrees C, in particular the influence on the resonance frequency and the Q-factor of the micro tuning fork. The refined sensor head contains a combination of a silicon tuning fork and an acoustic off-beam resonator and permits methane detection with a detection limit of S = (3.85 +/- 0.01) ppm. The functional capability of a numerical model for the optimization of acoustic off-beam resonators in COMSOL Multiphysics (R) is presented. (C) 2013 Optical Society of America
引用
收藏
页码:20911 / 20922
页数:12
相关论文
共 28 条
[1]  
Bottger S., APPL PHYS B IN PRESS
[2]   QEPAS spectrophones: design, optimization, and performance [J].
Dong, L. ;
Kosterev, A. A. ;
Thomazy, D. ;
Tittel, F. K. .
APPLIED PHYSICS B-LASERS AND OPTICS, 2010, 100 (03) :627-635
[3]  
Dong L., 2011, CLEO 2011 LAS APPL P
[4]  
Firebaugh S. L., 2010, SENS APPL S SAS
[5]   All-optical measurement of in-plane and out-of-plane Young's modulus and Poisson's ratio in silicon wafers by means of vibration modes [J].
França, DR ;
Blouin, A .
MEASUREMENT SCIENCE AND TECHNOLOGY, 2004, 15 (05) :859-868
[6]   New improvements in methane detection using a Helmholtz resonant photoacoustic laser sensor: A comparison between near-IR diode lasers and mid-IR quantum cascade lasers [J].
Grossel, A ;
Zeninari, V ;
Joly, L ;
Parvitte, B ;
Courtois, D ;
Durry, G .
SPECTROCHIMICA ACTA PART A-MOLECULAR AND BIOMOLECULAR SPECTROSCOPY, 2006, 63 (05) :1021-1028
[7]   Temperature dependence of the force sensitivity of silicon cantilevers [J].
Gysin, U ;
Rast, S ;
Ruff, P ;
Meyer, E ;
Lee, DW ;
Vettiger, P ;
Gerber, C .
PHYSICAL REVIEW B, 2004, 69 (04)
[8]   What is the Young's Modulus of Silicon? [J].
Hopcroft, Matthew A. ;
Nix, William D. ;
Kenny, Thomas W. .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2010, 19 (02) :229-238
[9]  
Kim J., 2001, P TRANSD
[10]  
Kittel C., 2004, INTRO SOLID STATE PH