A micromachined millimeter-wave cavity resonator on silicon and quartz substrates

被引：6
作者：
Song, KJ
Yoon, BS
Lee, JC
Lee, B
Kim, JH
Kim, NY
Park, JY
Kim, GH
Bu, JU
机构：
[1] Kwangwoon Univ, RFIC Res & Educ Ctr, Nowon Ku, Seoul 139701, South Korea
[2] Kwangwoon Univ, Miss Technol Res Ctr, Nowon Ku, Seoul 139701, South Korea
[3] LG Elect Inst Technol, Microsyst & RF Team, Mat & Devices Lab, Seocho Ku, Seoul 137140, South Korea
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 2001年 / 40卷 / 12B期
关键词：
cavity resonator; micromachining; Ka-band; loaded and unloaded Q;
D O I：
10.1143/JJAP.40.L1394
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
In this letter, a Ka-band cavity resonator using micromachining process is presented. A two-part cavity resonator is designed using the three-dimensional (3-D) design software, HP HFSS. The cavity resonator is fabricated on a Si substrate and bonded with a Quartz wafer. The resonator shows the resonant frequency of 39 GHz, the insertion loss of 4.6 dB, and the loaded quality factor (Q(L)) and unloaded quality factor (Q(U)) of 44.3 and 107, respectively.
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页码：L1394 / L1397
页数：4
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