One-stage fabrication of sub-micron hydrophilic microchannels on PDMS

被引：20
作者：
Wu, Zhongkui [1 ]
Yan, Haiying [1 ]
Chen, Hong [1 ,2 ]
Huang, He [1 ]
机构：
[1] Wuhan Univ Technol, Sch Mat Sci & Engn, Wuhan 430070, Peoples R China
[2] Wuhan Univ Technol, State Key Lab Adv Technol Mat Synth & Proc, Wuhan 430070, Peoples R China
来源：
APPLIED SURFACE SCIENCE | 2009年 / 255卷 / 08期
基金：
芬兰科学院;
关键词：
Fabrication; Hydrophilic; Microchannel; PDMS; Thin films; VUV; Atomic force microscopy; SURFACE MODIFICATION; HYDROPHOBIC RECOVERY; POLY(DIMETHYLSILOXANE); POLYDIMETHYLSILOXANE; PLASMA; ULTRAVIOLET; DISCHARGES; EXPOSURE;
D O I：
10.1016/j.apsusc.2008.11.083
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
A sub-micron hydrophilic microchannel was fabricated on poly(dimethylsiloxane) (PDMS) in one step using vacuum ultraviolet light (VUV) lithography in vacuum. The topographies and properties of the irradiated PDMS surface were characterized and analyzed by atomic force microscopy (AFM), and the chemical composition changes on VUV-treated PDMS analyzed by X-ray photoelectron spectroscopy (XPS). The hydrophilic stability of irradiated PDMS surface was studied by static water contact angle. As demonstrated, the hydrophilicity on surface of PDMS microchannel can be kept for a longer term even three months after the treatment. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码：4702 / 4704
页数：3
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