Plasma Directed Organization of Nanodots on Polymers: Effects of Polymer Type and Etching Time on Morphology and Order

被引：29

作者：

Kontziampasis, Dimitrios ^{[1
]}

Constantoudis, Vassilios ^{[1
]}

Gogolides, Evangelos ^{[1
]}

机构：

[1] NCSR Demokritos, Inst Microelect, Athens 15310, Greece

来源：

PLASMA PROCESSES AND POLYMERS | 2012年 / 9卷 / 09期

关键词：

directed assembly; metrological characterization; nanofabrication; O2; plasmas; polymers; FABRICATION; NANOSTRUCTURES; LITHOGRAPHY;

D O I：

10.1002/ppap.201100163

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Oxygen plasma etching of poly(methyl methacrylate) (PMMA), poly(ethylene terephthalate) (PET), and polystyrene (PS) leads to the formation of organized nanodots on the surfaces of the polymers. In this paper, we describe the metrological characterization of these nanodots and compare their morphology as a function of the polymer type. We study the evolution of the surface morphology with etching time and observe a transition point where dual scale roughness develops, order is lost, and sudden increase in the surface roughness is observed. Possible mechanisms are discussed.

引用

页码：866 / 872

页数：7

共 27 条

[1] The controlled formation of ordered, sinusoidal structures by plasma oxidation of an elastomeric polymer [J].

Bowden, N ;

Huck, WTS ;

Paul, KE ;

Whitesides, GM .

APPLIED PHYSICS LETTERS, 1999, 75 (17) :2557-2559

[2] Relationship between nanoscale roughness and ion-damaged layer in argon plasma exposed polystyrene films [J].

Bruce, R. L. ;

Weilnboeck, F. ;

Lin, T. ;

Phaneuf, R. J. ;

Oehrlein, G. S. ;

Long, B. K. ;

Willson, C. G. ;

Vegh, J. J. ;

Nest, D. ;

Graves, D. B. .

JOURNAL OF APPLIED PHYSICS, 2010, 107 (08)

[3] Fabrication of Polymeric Nanorods Using Bilayer Nanoimprint Lithography [J].

Buyukserin, Fatih ;

Aryal, Mukti ;

Gao, Jinming ;

Hu, Wenchuang .

SMALL, 2009, 5 (14) :1632-1636

[4] Fabrication of sub-100 nm patterns in SiO2 templates by electron-beam lithography for the growth of periodic III-V semiconductor nanostructures [J].

Chen, A. ;

Chua, S. J. ;

Chen, P. ;

Chen, X. Y. ;

Jian, L. K. .

NANOTECHNOLOGY, 2006, 17 (15) :3903-3908

[5] Study on the Combined Effects of Solvent Evaporation and Polymer Flow upon Block Copolymer Self-Assembly and Alignment on Topographic Patterns [J].

Fitzgerald, Thomas G. ;

Farrell, Richard A. ;

Petkov, Nikolay ;

Bolger, Ciara T. ;

Shaw, Matthew T. ;

Charpin, Jean P. F. ;

Gleeson, James P. ;

Holmes, Justin D. ;

Morris, Michael A. .

LANGMUIR, 2009, 25 (23) :13551-13560

[6] Surface engineering with ion beams: from self-organized nanostructures to ultra-smooth surfaces [J].

Frost, F. ;

Ziberi, B. ;

Schindler, A. ;

Rauschenbach, B. .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2008, 91 (04) :551-559

[7] Track formation and fabrication of nanostructures with MeV-ion beams [J].

Toulemonde, M ;

Trautmann, C ;

Balanzat, E ;

Hjort, K ;

Weidinger, A .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2004, 216 :1-8

[8]

Gogolides E., 2011, [No title captured], Patent No. [EP 2300214 2011, 2300214]

[9] Controlling roughness: from etching to nanotexturing and plasma-directed organization on organic and inorganic materials [J].

Gogolides, Evangelos ;

Constantoudis, Vassilios ;

Kokkoris, George ;

Kontziampasis, Dimitrios ;

Tsougeni, Katerina ;

Boulousis, George ;

Vlachopoulou, Marilena ;

Tserepi, Angeliki .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2011, 44 (17)

[10] Photonic Nanojets [J].

Heifetz, Alexander ;

Kong, Soon-Cheol ;

Sahakian, Alan V. ;

Taflove, Allen ;

Backman, Vadim .

JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE, 2009, 6 (09) :1979-1992

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