Mid-infrared nanoantenna arrays on silicon and CaF2 substrates for sensing applications

被引：22

作者：

Businaro, L. ^{[1
]}

Limaj, O. ^{[2
]}

Giliberti, V. ^{[2
]}

Ortolani, M. ^{[1
]}

Di Gaspare, A. ^{[1
]}

Grenci, G. ^{[3
]}

Ciasca, G. ^{[1
]}

Gerardino, A. ^{[1
]}

de Ninno, A. ^{[1
]}

Lupi, S. ^{[2
]}

机构：

[1] CNR, Inst Photon & Nanotechnol, I-00156 Rome, Italy

[2] Univ Roma La Sapienza, I-00185 Rome, Italy

[3] CNR, Inst Officina Mat, I-34149 Trieste, Italy

来源：

MICROELECTRONIC ENGINEERING | 2012年 / 97卷

关键词：

Nanoantenna arrays; FTIR; Plasmon resonance; Microfluidic devices;

D O I：

10.1016/j.mee.2012.02.025

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on the fabrication and systematic characterization of nanoantenna arrays with several different geometries realized both on standard silicon (Si) substrates and Calcium Fluoride (CaF2) substrates aimed at the realization of a mid-Infrared protein detector. In particular, we present a novel nanofabrication procedure which allows the adoption of CaF2 in a standard lithographic process with results comparable to the ones obtained on silicon wafers. The transmittance and reflectance spectra of the nanoantennas, were acquired by means of an Infrared microscope coupled to a Michelson Interferometer. In all the nanoantenna devices, the plasmonic resonance follows a linear scaling relation: a lattice parameter change of a +/-(5-10)%, indeed, results in a shift of the Si (1,0) plasmonic resonance frequency which is proportional to 1/a. This scaling behavior offers a useful tool for device frequency tuning, which can be used to obtain a fine spectral overlap with the protein amide-I and amide-II bands. A Lorentzian analysis of the resonance peaks reveals that our nanostructures have an high Q factor (Q = v(0)/Delta v), demonstrating the effectiveness of our fabrication procedures. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：197 / 200

页数：4

共 8 条

[1] Ultra-sensitive vibrational spectroscopy of protein monolayers with plasmonic nanoantenna arrays [J].