ZrLaOx/ZrTiOx/ZrLaOx Laminate as Insulator for MIM Capacitors With High Capacitance Density and Low Quadratic Voltage Coefficient Using Canceling Effect

被引：8
作者：
Chen, Lun Lun [1 ]
Wu, Yung-Hsien [1 ]
Lin, Yu-Bo [1 ]
Lin, Chia-Chun [1 ]
Wu, Min-Lin [1 ]
机构：
[1] Natl Tsing Hua Univ, Dept Engn & Syst Sci, Hsinchu 300, Taiwan
来源：
IEEE ELECTRON DEVICE LETTERS | 2012年 / 33卷 / 10期
关键词：
Canceling effect; metal-insulator-metal (MIM) capacitors; negative quadratic voltage coefficient of capacitance (VCC-alpha); ZrLaOx/ZrTiOx/ZrLaOx laminate; METAL CAPACITORS;
D O I：
10.1109/LED.2012.2209396
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Metal-insulator-metal (MIM) capacitors with ZrLaOx/ZrTiOx/ZrLaOx laminate as the insulator were explored in this work. Single ZrTiOx dielectric was found to have a negative quadratic voltage coefficient of capacitance (VCC-alpha) with a high kappa value of 22.5. By integrating this dielectric with ZrLaOx which provides a positive VCC-alpha and a high kappa value of 25.8, the "canceling effect" of VCC-alpha can be achieved while a high capacitance density can be maintained. MIM capacitors with the laminated structure display desirable characteristics in terms of a capacitance density of 14.6 fF/mu m(2), a low VCC-alpha of 33 ppm/V-2, negligible frequency dispersion, and satisfactory leakage current of 1.6 x 10(-6) A/cm(2) at -1.5 V. These results also well meet the International Technology Roadmap for Semiconductors requirement set for 2020.
引用
收藏
页码：1447 / 1449
页数：3
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