Nano-Workbench: A Combined Hollow AFM Cantilever and Robotic Manipulator †

To manipulate liquid matter at the nanometer scale, we have developed a robotic assembly equipped with a hollow atomic force microscope (AFM) cantilever that can handle femtolitre volumes of liquid. The assembly consists of four independent robots, each sugar cube sized with four degrees of freedom. All robots are placed on a single platform around the sample forming a nano-workbench (NWB). Each robot can travel the entire platform and has a minimum position resolution of 5 nm both in-plane and out-of-plane. The cantilever chip was glued to the robotic arm. Dispensing was done by the capillarity between the substrate and the cantilever tip, and was monitored visually through a microscope. To evaluate the performance of the NWB, we have performed three experiments: clamping of graphene with epoxy, mixing of femtolitre volume droplets to synthesize gold nanoparticles and accurately dispense electrolyte liquid for a nanobattery.