Measurement of DOE's 3-D surface profile based on two-wavelength phase-shifting interferometry and data analysis

被引：0

作者：

Zhou, MB ^{[1
]}

机构：

[1] Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China

来源：

ISTM/99: 3RD INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT | 1999年

关键词：

D O I：

暂无

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

The paper describes a new three-dimensional surface profile measuring method based on two-wavelength phase-shifting interferometry (PSI) and data analysis, which can be applied to measure the 3-D surface profile of a continuous type diffraction optical element (DOE) as well as a discontinuous type DOE. With the method a new measuring system is set up. The depth resolution is 0.5nm, the depth measuring range is 1.5 mu m (when two-wavelenth measurement method of lambda(1)=0.6 mu m, lambda(2)=0.5 mu m is adopted), the depth measuring accuracy is better than 1.3nm. This basically fulfills the demand for surface profile measurement of DOE.

引用

页码：830 / 834

页数：5

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