Fundamental characteristics of hybrid X-ray focusing optics for micro X-ray fluorescence analysis

被引:9
作者
Komatani, Shintaro [1 ,2 ]
Nakamachi, Kazuo [1 ]
Nakano, Kazuhiko [1 ]
Ohzawa, Sumito [2 ]
Uchihara, Hiroshi [2 ]
Bando, Atsushi [2 ]
Tsuji, Kouichi [1 ]
机构
[1] Osaka City Univ, Grad Sch Engn, Dept Appl Chem & Bioengn, Sumiyoshi, Osaka 5588585, Japan
[2] Horiba Ltd, Minami Ku, Kisshoin, Kyoto 6018510, Japan
基金
日本学术振兴会;
关键词
Micro X-ray fluorescence; Polycapillary X-ray lens; Monocapillary X-ray lens; Pinhole; Elemental mapping; ENERGY-DEPENDENCE; XRF SPECTROMETER; GUIDE TUBE; LENS; TRANSMISSION; REFLECTION; PINHOLE; BEAMS; GLASS;
D O I
10.1016/j.nimb.2013.02.023
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We developed a hybrid X-ray focusing optics, which consisted of a polycapillary X-ray lens (PC(L) and a tungsten conical pinhole (WCP) for micro X-ray fluorescence (mu-XRF) analysis. A single PCXL produced an X-ray micro beam with a spot size of 12 mu m. We developed a WCP by using a laser-ablation technique with an input diameter of 39 mu m, an output diameter of 2.5 mu m, and a thickness of 0.5 mm in a conical shape. This hybrid X-ray optics gave a small spot size of 2.8 mu m with a small divergent angle of 12 mrad. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码:260 / 263
页数:4
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