Towards a high-resolution flow camera using artificial hair sensor arrays for flow pattern observations

被引：43

作者：

Dagamseh, A. M. K. ^{[1
]}

Wiegerink, R. J. ^{[1
]}

Lammerink, T. S. J. ^{[1
]}

Krijnen, G. J. M. ^{[1
]}

机构：

[1] Univ Twente, MESA Res Inst, Transducers Sci & Technol Grp, NL-7500 AE Enschede, Netherlands

来源：

BIOINSPIRATION & BIOMIMETICS | 2012年 / 7卷 / 04期

关键词：

INTERFERENCE DEVICE MULTIPLEXER; PARALLEL ACQUISITION; RECEPTOR HAIRS; DESIGN; SYSTEM;

D O I：

10.1088/1748-3182/7/4/046009

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Flow-sensor arrays uncover the potential to measure spatio-temporal flow patterns rather than flow measurements at just a single point. We present in this paper the developments in design, fabrication and interfacing of biomimetic flow-sensor arrays, inspired by flow-sensitive organs (cerci) of crickets. For the purpose of high-resolution flow field visualization by our artificial hair flow-sensor arrays, various array-interfacing schemes are discussed and compared. Frequency division multiplexing (FDM) is shown to be an attractive method for efficient interrogation of capacitive array sensors. Using silicon-on-insulator technology with deep trench isolation structures, hair-based flow-sensors with differential capacitive read-out, arranged in single-chip arrays, have been successfully fabricated. FDM is implemented and used to interrogate individual hair sensors providing simultaneous real-time flow measurements from multiple hairs. This powerful approach is demonstrated by reconstruction of the field of a harmonic dipole field at the position of the hairs and by localizing this dipole source relative to the array elements.

引用

页数：12

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