Atomic layer deposition of Al2O3 and Al2O3/TiO2 barrier coatings to reduce the water vapour permeability of polyetheretherketone

被引:28
|
作者
Ahmadzada, Tamkin [1 ]
McKenzie, David R. [2 ]
James, Natalie L. [2 ]
Yin, Yongbai [2 ]
Li, Qing [1 ]
机构
[1] Univ Sydney, Sch Aerosp Mech & Mechatron Engn, Sydney, NSW 2006, Australia
[2] Univ Sydney, Sch Phys, Sydney, NSW 2006, Australia
基金
澳大利亚研究理事会;
关键词
Polyetheretherketone; Water vapour permeability; Atomic layer deposition; Thin film coating; GAS-DIFFUSION BARRIERS; PACKAGING MATERIALS; AMORPHOUS-CARBON; HARD COATINGS; POLYMERS; MULTILAYER; FRACTURE; TOUGHNESS; GROWTH; FILMS;
D O I
10.1016/j.tsf.2015.08.038
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Wedemonstrate significantly enhanced barrier properties of polyetheretherketone (PEEK) against water vapour penetration by depositing Al2O3 or Al2O3/TiO2 nanofilms grown by atomic layer deposition (ALD). Nanoindentation analysis revealed good adhesion strength of a bilayer Al2O3/TiO2 coating to PEEK, while the single layer Al2O3 coating displayed flaking and delamination. We identified three critical design parameters for achieving the optimum barrier properties of ALDAl(2)O(3)/TiO2 coatings on PEEK. These are a minimum total thickness dependent on the required water vapour transmission rate, the use of an Al2O3/TiO2 bilayer coating and the application of the coating to both sides of the PEEK film. Using these design parameters, we achieved a reduction in moisture permeability of PEEK of over two orders of magnitude while maintaining good adhesion strength of the polymer-thin film system. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码:131 / 136
页数:6
相关论文
共 50 条
  • [1] Al2O3 and TiO2 Atomic Layer Deposition on Copper for Water Corrosion Resistance
    Abdulagatov, A. I.
    Yan, Y.
    Cooper, J. R.
    Zhang, Y.
    Gibbs, Z. M.
    Cavanagh, A. S.
    Yang, R. G.
    Lee, Y. C.
    George, S. M.
    ACS APPLIED MATERIALS & INTERFACES, 2011, 3 (12) : 4593 - 4601
  • [2] Silicon diffusion control in atomic-layer-deposited Al2O3/La2O3/Al2O3 gate stacks using an Al2O3 barrier layer
    Wang, Xing
    Liu, Hong-Xia
    Fei, Chen-Xi
    Yin, Shu-Ying
    Fan, Xiao-Jiao
    NANOSCALE RESEARCH LETTERS, 2015, 10
  • [3] Multilayer Al2O3/TiO2 Atomic Layer Deposition coatings for the corrosion protection of stainless steel
    Marin, E.
    Guzman, L.
    Lanzutti, A.
    Ensinger, W.
    Fedrizzi, L.
    THIN SOLID FILMS, 2012, 522 : 283 - 288
  • [4] Uniform color coating of multilayered TiO2/Al2O3 films by atomic layer deposition
    Woo-Hee Kim
    Hyungjun Kim
    Han-Bo-Ram Lee
    Journal of Coatings Technology and Research, 2017, 14 : 177 - 183
  • [5] Uniform color coating of multilayered TiO2/Al2O3 films by atomic layer deposition
    Kim, Woo-Hee
    Kim, Hyungjun
    Lee, Han-Bo-Ram
    JOURNAL OF COATINGS TECHNOLOGY AND RESEARCH, 2017, 14 (01) : 177 - 183
  • [6] Effect of Al2O3 layer thickness on leakage current and dielectric properties of atomic layer deposited Al2O3/TiO2/Al2O3 nano-stack
    Padhi, Partha Sarathi
    Ajimsha, R. S.
    Rai, Sanjay Kumar
    Bose, Aniruddha
    Misra, Pankaj
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2023, 34 (14)
  • [7] Barrier properties of plastic films coated with an Al2O3 layer by roll-to-toll atomic layer deposition
    Hirvikorpi, Terhi
    Laine, Risto
    Vaha-Nissi, Mika
    Kilpi, Vaino
    Salo, Erkki
    Li, Wei-Min
    Lindfors, Sven
    Vartiainen, Jari
    Kentta, Eija
    Nikkola, Juha
    Harlin, Ali
    Kostamo, Juhana
    THIN SOLID FILMS, 2014, 550 : 164 - 169
  • [8] Transparent capacitors based on nanolaminate Al2O3/TiO2/Al2O3 with H2O and O3 as oxidizers
    Zhang, G. Z.
    Wu, H.
    Chen, C.
    Wang, T.
    Wang, P. Y.
    Mai, L. Q.
    Yue, J.
    Liu, C.
    APPLIED PHYSICS LETTERS, 2014, 104 (16)
  • [9] Nucleation and growth during the atomic layer deposition of W on Al2O3 and Al2O3 on W
    Grubbs, RK
    Nelson, CE
    Steinmetz, NJ
    George, SM
    THIN SOLID FILMS, 2004, 467 (1-2) : 16 - 27
  • [10] Nanoscratch testing of atomic layer deposition and magnetron sputtered TiO2 and Al2O3 coatings on polymeric substrates
    Kaariainen, Tommi O.
    Kelly, Peter J.
    Cameron, David C.
    Beake, Ben
    Li, Heqing
    Barker, Paul M.
    Struller, Carolin F.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2012, 30 (01):