共 7 条
- [1] Study on Repetitive PID Control of Linear Motor in Wafer Stage of Lithography [J]. 2012 INTERNATIONAL WORKSHOP ON INFORMATION AND ELECTRONICS ENGINEERING, 2012, 29 : 3863 - 3867
- [2] Huafeng Gu, 2008, MACHINE TOOL HYDRAUL, V36, P216
- [4] Robust friction compensation for submicrometer positioning and tracking for a ball-screw-driven slide system [J]. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2000, 24 (02): : 160 - 173
- [5] [苏义鑫 SU Yixin], 2011, [控制工程, Control Engineering of China], V18, P685
- [7] Fuzzy PID Control To Feed Servo System of CNC Machine Tool [J]. 2012 INTERNATIONAL WORKSHOP ON INFORMATION AND ELECTRONICS ENGINEERING, 2012, 29 : 2853 - 2858