Development of pNH4-ISFETS microsensors for water analysis

被引：20

作者：

Humenyuk, I ^{[1
]}

Torbiéro, B ^{[1
]}

Assié-Souleille, S ^{[1
]}

Colin, R ^{[1
]}

Dollat, X ^{[1
]}

Franc, B ^{[1
]}

Martinez, A ^{[1
]}

Temple-Boyer, P ^{[1
]}

机构：

[1] CNRS, LAAS, F-31077 Toulouse 4, France

来源：

MICROELECTRONICS JOURNAL | 2006年 / 37卷 / 06期

关键词：

ChemFET sensor; pNH(4); water analysis;

D O I：

10.1016/j.mejo.2005.09.024

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Front-side connected, N-channel, normally-off, SiO2/Si3N4 chemical field effect transistor (ChemFET) microsensors; have been fabricated using a standard P-well silicon technology. These ChemFETs microsensors were adapted to ammonium ion detection thanks to photosensitive polysiloxane (PSX) polymer containing nonactine as an ionophore. The ammonium-sensitive membrane has been deposited either manually by micropipette, either by spin coating and patterned using photolithography technique. Both processes have been studied and compared through the ammonium ion determination. The manually deposed layers have been characterised by thickness non-reproducibility. Therefore, spin-coated layers have good reproducibility, but their thickness of 30 mu m has been responsible for an increase of the ISFET threshold voltage and a decrease of its bias current. Nevertheless, in both cases, good sensitivities have been shown on the (1-5) pNH(4) range even if saturation phenomena have been evidenced for the lowest concentrations. These pNH(4)-ISFETs microsensors are developed for the monitoring of environmental pollution and more precisely for ground water analysis. (C) 2005 Elsevier Ltd. All rights reserved.

引用

页码：475 / 479

页数：5

共 11 条

[1] Thirty years of ISFETOLOGY - What happened in the past 30 years and what may happen in the next 30 years
Bergveld, P
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 2003, 88 (01) : 1 - 20
[2] Investigation of chloride sensitive ISFETs with different membrane compositions suitable for medical applications
Bratov, A
Abramova, N
Domínguez, C
[J]. ANALYTICA CHIMICA ACTA, 2004, 514 (01) : 99 - 106
[3] Microtechnologies for pH ISFET chemical sensors
Cane, C
Gracia, I
Merlos, A
[J]. MICROELECTRONICS JOURNAL, 1997, 28 (04) : 389 - 405
[4] Multi-ion analysis based on versatile sensor head
Chudy, M
Wróblewski, W
Dybko, A
Brzózka, Z
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 2001, 78 (1-3) : 320 - 325
[5] Influence of the organic matrix on the properties of membrane coated ion sensor field-effect transistors
Kolytcheva, NV
Müller, H
Marstalerz, J
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1999, 58 (1-3) : 456 - 463
[6] Photosensitive polyurethanes applied to the development of CHEMFET and ENFET devices for biomedical sensing
Munoz, J
Jimenez, C
Bratov, A
Bartroli, J
Alegret, S
Dominguez, C
[J]. BIOSENSORS & BIOELECTRONICS, 1997, 12 (07) : 577 - 585
[7] DURABLE CHEMICAL SENSORS BASED ON FIELD-EFFECT TRANSISTORS
REINHOUDT, DN
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1995, 24 (1-3) : 197 - 200
[8] Study of front-side connected chemical field effect transistor for water analysis
Temple-Boyer, P
Launay, J
Humenyuk, I
Do Conto, T
Martinez, A
Bériet, C
Grisel, A
[J]. MICROELECTRONICS RELIABILITY, 2004, 44 (03) : 443 - 447
[9] AN ISFET-BASED CALCIUM SENSOR USING A PHOTOPOLYMERIZED POLYSILOXANE MEMBRANE
VANDENBERG, A
GRISEL, A
VERNEYNORBERG, E
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1991, 4 (3-4) : 235 - 238
[10] UNIVERSAL APPROACH FOR THE FABRICATION OF CA(2+)-, K+- AND NO(3)- - SENSITIVE MEMBRANE ISFETS
VANDERWAL, PD
VANDENBERG, A
DEROOIJ, NF
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1994, 18 (1-3) : 200 - 207

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