Chip-scale fluorescence microscope based on a silo-filter complementary metal-oxide semiconductor image sensor

被引：27

作者：

Lee, Seung Ah ^{[1
]}

Ou, Xiaoze ^{[1
]}

Lee, J. Eugene ^{[2
]}

Yang, Changhuei ^{[1
]}

机构：

[1] CALTECH, Dept Elect Engn, Pasadena, CA 91125 USA

[2] Korea Res Inst Stand & Sci, Div Metrol Qual Life, Ctr Bioanal, Taejon 305340, South Korea

来源：

OPTICS LETTERS | 2013年 / 38卷 / 11期

关键词：

CELL; WIDE;

D O I：

10.1364/OL.38.001817

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate a silo-filter (SF) complementary metal-oxide semiconductor (CMOS) image sensor for a chip-scale fluorescence microscope. The extruded pixel design with metal walls between neighboring pixels guides fluorescence emission through the thick absorptive filter to the photodiode of a pixel. Our prototype device achieves 13 mu m resolution over a wide field of view (4.8 mm x 4.4 mm). We demonstrate bright-field and fluorescence longitudinal imaging of living cells in a compact, low-cost configuration. (C) 2013 Optical Society of America

引用

页码：1817 / 1819

页数：3

共 50 条

[21] Fluorescence imaging under background light with a self-reset complementary metal-oxide-semiconductor image sensor
Yamaguchi, Takahiro
Sunaga, Yoshinori
Haruta, Makito
Motoyama, Mayumi
Ohta, Yasumi
Takehara, Hiroaki
Noda, Toshihiko
Sasagawa, Kiyotaka
Tokuda, Takashi
Ohta, Jun
JOURNAL OF ENGINEERING-JOE, 2015, : 1 - 3
[22] Metal oxide-based monolithic complementary metal oxide semiconductor gas sensor microsystem
Graf, M
Barrettino, D
Taschini, S
Hagleitner, C
Hierlemann, A
Baltes, H
ANALYTICAL CHEMISTRY, 2004, 76 (15) : 4437 - 4445
[23] MICROMACHINED VERTICAL HALL MAGNETIC-FIELD SENSOR IN STANDARD COMPLEMENTARY METAL-OXIDE SEMICONDUCTOR TECHNOLOGY
PARANJAPE, M
RISTIC, L
APPLIED PHYSICS LETTERS, 1992, 60 (25) : 3188 - 3190
[24] Finite element method as applied to the study of gratings embedded in complementary metal-oxide semiconductor image sensors
Demesy, Guillaume
Zolla, Frederic
Nicolet, Andre
Commandre, Mireille
Fossati, Caroline
Gagliano, Olivier
Ricq, Stephane
Dunne, Brendan
OPTICAL ENGINEERING, 2009, 48 (05)
[25] Evaluation of complementary metal-oxide semiconductor based photodetectors for low-level light detection
Ardeshirpour, Yasaman
Deen, M. Jamal
Shirani, Shahram
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2006, 24 (03): : 860 - 865
[26] Insights in junction photovoltage based sheet resistance measurements for advanced complementary metal-oxide semiconductor
Clarysse, Trudo
Moussa, Alain
Zangerle, Thomas
Schaus, Frederic
Vandervorst, Wilfried
Faifer, Vladimir
Current, Michael
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2008, 26 (01): : 420 - 424
[27] Color Imaging via Nearest Neighbor Hole Coupling in Plasmonic Color Filters Integrated onto a Complementary Metal-Oxide Semiconductor Image Sensor
Burgos, Stanley P.
Yokogawa, Sozo
Atwater, Harry A.
ACS NANO, 2013, 7 (11) : 10038 - 10047
[28] Design of Infrared and Visible Image Recognition and Fusion System Based on Complementary Metal-Oxide-Semiconductor (CMOS) Image Sensor
Zhang, Zeliang
Cao, Jian
JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS, 2018, 13 (08) : 1167 - 1174
[29] Ratiometric, filter-free optical sensor based on a complementary metal oxide semiconductor buried double junction photodiode
Yung, Ka Yi
Zhan, Zhiyong
Titus, Albert H.
Baker, Gary A.
Bright, Frank V.
ANALYTICA CHIMICA ACTA, 2015, 884 : 77 - 82
[30] Quantum-correlated photon pairs generated in a commercial 45 nm complementary metal-oxide semiconductor microelectronic chip
Gentry, Cale M.
Shainline, Jeffrey M.
Wade, Mark T.
Stevens, Martin J.
Dyer, Shellee D.
Zeng, Xiaoge
Pavanello, Fabio
Gerrits, Thomas
Nam, Sae Woo
Mirin, Richard P.
Popovic, Milos A.
OPTICA, 2015, 2 (12): : 1065 - 1071

← 1 2 3 4 5 →