Computational studies of plasma generation and control in a magnetron sputtering system

被引：32

作者：

Ido, S ^{[1
]}

Kashiwagi, M ^{[1
]}

Takahashi, M ^{[1
]}

机构：

[1] Saitama Univ, Fac Engn, Urawa, Saitama 3380825, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 7B期

关键词：

magnetron sputtering system; ferromagnetic target; lifetime of the target; modifications of the magnetic field;

D O I：

10.1143/JJAP.38.4450

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The problems in plasma generation and erosion profiles are studied by tracing an electron in a cylindrical magnetron sputtering system with a ferromagnetic target. The magnetic field is analyzed using the finite-element method (FEM). The magnetic fields in the basic reference model are generated by a permanent magnet in the center and a yoke of soft iron around the central permanent magnet. First, the yoke is moved to change the erosion profiles. Second, the permanent magnet replaces the yoke. In both systems, the erosion profiles and the configuration of the magnetic field are examined when the yoke and the magnet in the outer are moved.

引用

页码：4450 / 4454

页数：5

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