Reference samples for the spatial characteristics of nanostructures based on amorphous multilayer coatings

被引：0

作者：

Baturin, A. S. ^{[1
]}

Bormashov, V. S. ^{[1
]}

Ermakova, M. A. ^{[1
]}

Morozova, E. A. ^{[1
]}

Morozov, S. A. ^{[1
]}

Korostylev, E. V. ^{[1
]}

Zarubin, S. S. ^{[1
]}

Markeev, A. M. ^{[1
]}

Todua, P. A. ^{[2
]}

机构：

[1] Moscow Inst Phys & Technol MFTI, Dolgoprudnyi, Russia

[2] Res Ctr Study Properties Surfaces & Vacuum NITsPV, Moscow, Russia

来源：

MEASUREMENT TECHNIQUES | 2013年 / 56卷 / 06期

关键词：

standard samples for spatial characteristics; x-ray reflectometry; multilayer films; atomic layer deposition; ATOMIC LAYER DEPOSITION; THIN-FILMS;

D O I：

10.1007/s11018-013-0252-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The development of the reference samples SPAM-20 and SPAM-100 for the spatial characteristics of nanostructures, based on periodic multilayer Al2O3/TiO2 coatings and intended for monitoring measurement accuracy and certification of x-ray reflectometry measurement techniques, is discussed. The metrological characteristics of these standard samples are examined.

引用

页码：605 / 611

页数：7

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