Chemical amplification resists: History and development within IBM

被引：102
作者：
Ito, H
机构：
[1] IBM Research Division, Almaden Research Center, San Jose, CA 95120
[2] Science and Technology Department, Almaden Research Center
[3] Chemistry Department, State University of New York, Syracuse, NY
[4] IBM, San Jose Research Laboratory
[5] American Chemical Society, Society of Polymer Science
来源：
IBM JOURNAL OF RESEARCH AND DEVELOPMENT | 1997年 / 41卷 / 1-2期
关键词：
D O I：
10.1147/rd.411.0069
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
The chemical amplification concept was invented at ISM Research and quickly brought into use in the production of dynamic random access memory devices in the company. It has remained as an important foundation for the design of advanced resist systems for use in short-wavelength (<300-nm) lithographic technologies.
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收藏
页码：69 / 80
页数：12
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