Electroless nickel/gold bump in the flip-chip-type CMOS package for mobile-phone camera modules

被引:8
作者
Kim, JD [1 ]
机构
[1] Samsung Techwin Co Ltd, Semicond Mat R&D Ctr, Yongin 449712, Kyoungki, South Korea
关键词
wafer bumping; electroless nickel/gold bump; flip-chip-type CMOS image-sensor package;
D O I
10.1007/BF02692446
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Wafer bumping technology using electroless nickel bump with a thin gold layer was studied for the flip-chip-type CMOS image-sensor (CIS) package for mobile-phone camera modules. The precise control of process parameters in the electroless nickel solution was undertaken by synthetic consideration of the effects of solution temperature, pH, stabilizer concentration, and aluminum pad size on the electroless nickel/gold bump formation. The flip-chip bonding process fitting the electroless nickel/gold bump is conducted by optimization of bonding temperature, pressure, and time. Reliability tests are performed to ensure the robustness of the image-sensor module. The impurity particle density is estimated to be one per 300,000 pixels by 3D laser analysis on the image-sensor surface. The phenomenon of the drop in chip yield during the wet process is attributed to the organic particles produced during the wafer backside coating. From all the experimental results, we first suggest that electroless nickel/gold can be applied to the flip-chip-type CIS package for the mobile-phone camera module without any significant impurity contamination of the image-sensor surface.
引用
收藏
页码:273 / 278
页数:6
相关论文
共 17 条
[1]  
BARD AJ, 1980, MASS TRANSFER MIGRAT, P119
[2]   Electroless nickel bath for wafer bumping: Influence of additives [J].
Chen, X ;
Yi, J ;
Qi, G ;
Liu, F .
PROCEEDINGS OF INTERNATIONAL SYMPOSIUM ON ELECTRONIC MATERIALS AND PACKAGING, 2000, :12-17
[3]  
DAVID EH, 2002, IEEE T COMPON PACK T, V25, P87
[4]  
DAVID EH, 2002, IEEE T COMPON PACK T, V25, P98
[5]  
DAVIES E, 1964, IBM J REV DEV, V102
[6]  
GOODMAN TW, 1997, FLIP CHIP TECHNOLOGI, P17
[7]  
JANG SJ, 2004, NICKEL BUMP QUALIFIC
[8]   Studies of electroless nickel under bump metallurgy-solder interfacial reactions and their effects on flip chip solder joint reliability [J].
Jeon, YD ;
Paik, KW ;
Bok, KS ;
Choi, WS ;
Cho, CL .
JOURNAL OF ELECTRONIC MATERIALS, 2002, 31 (05) :520-528
[9]   A study on interfacial reactions between electroless Ni-P under bump metallization and 95.5Sn-4.0Ag-0.5Cu alloy [J].
Jeon, YD ;
Nieland, S ;
Ostmann, A ;
Reichl, H ;
Paik, KW .
JOURNAL OF ELECTRONIC MATERIALS, 2003, 32 (06) :548-557
[10]  
JUNG HC, 2004, FLIP CHIP TYPE CMOS