Optimizing noise and stability of MEMS accelerometers for various applications

被引：0

作者：

Cole, John ^{[1
]}

Cunningham, Andy ^{[1
]}

MacDonald, Rob ^{[1
]}

McGimpsey, Sandra ^{[1
]}

McQuaide, Sarah ^{[1
]}

McShain, Darby ^{[1
]}

机构：

[1] Silicon Designs Inc, 13905 NE 128th St, Kirkland, WA 98034 USA

来源：

PROCEEDINGS OF THE 2016 IEEE/ION POSITION, LOCATION AND NAVIGATION SYMPOSIUM (PLANS) | 2016年

关键词：

Accelerometer; MEMS; silicon; ASIC; navigation; stability; noise;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The small signal levels provided by the limited size and inertial mass of miniature, open-loop MEMS accelerometers provide a challenging problem to achieve low noise and high stability needed for navigation and other applications. The challenge is made more difficult when different applications need to operate at a wide range of different peak g-levels. This paper discusses the performance achieved with six models of accelerometers recently introduced, built with a family of sense elements that optimize the sense element sensitivity to match the glevels needed. It shows the measured performance of models designed to cover a subset of the range from 2 to 100 G, and it shows how different error sources are reflected in the Allan Deviation curves for the different g-level accelerometers.

引用

页码：9 / 14

页数：6