Silicon wafer technology. Status and overlook at the millennium and a decade beyond

被引:0
作者
Mozer, AP [1 ]
机构
[1] Wacker Siltron Corp, Burghausen, Germany
关键词
microelectronics; technology roadmap; silicon wafer technology;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
As the Semiconductor industry moves into the 21st century, the challenges to the wafer supplier are anticipated to increase dramatically. Increased silicon crystal perfection, lager wafer diameter, a continuous need to improve the wafer surface to meet the next design rule generation and dramatic price pressure are challenges of the wafer manufacturer. An outline of these activities and constraints to meet these requirements is given.
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页码:1 / 10
页数:10
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