Waveguide microinterferometry system for microelements investigation

被引：1

作者：

Salbut, L ^{[1
]}

Józwik, M ^{[1
]}

Gorecki, C ^{[1
]}

Lee, SS ^{[1
]}

机构：

[1] Warsaw Univ Technol, Inst Micromech & Photon, PL-02525 Warsaw, Poland

来源：

MICROSYSTEMS ENGINEERING: METROLOGY AND INSPECTION | 2001年 / 4400卷

关键词：

optical methods of testing; interferometry; grating interferometer; MEMS; MOEMS;

D O I：

10.1117/12.445596

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

In the paper the measurement concept based on full-field optical methods is presented. In order to fulfil most of the requirements connected with advanced microelement and micromaterial testing a waveguide microinterferometer based on grating interferometry method is proposed and described in details. The modification of this system for 3D-displacement measurements is presented. The applicability of the microinterferometer is shown at the examples of silicon beam and micromembranes testing.

引用

页码：138 / 143

页数：6