MEMS 3-Dimensional Scanner for Handheld Confocal Microscope

被引：0

作者：

Liu, Tianbo ^{[1
]}

Dickensheets, David L. ^{[1
]}

机构：

[1] Montana State Univ, Elect & Comp Engn Dept, Bozeman, MT 59717 USA

来源：

2017 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) | 2017年

关键词：

3-dimensional MEMS scanner; biaxial lissajous scanning; deformable mirror; handheld confocal; SU-8; hinges;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A MEMS scanning mirror based on a deformable SU-8 membrane mirror supported by a biaxial gimbal with SU-8 flexures delivers 3-dimensional beam scanning for a handheld confocal microscope. Beam scanning and focusing performance are characterized.

引用

页码：139 / 140

页数：2