Optical vortex metrology for nanometric speckle displacement measurement

被引：115

作者：

Wang, W

Yokozeki, T

Ishijima, R

Wada, A

Miyamoto, Y

Takeda, M

Hanson, SG

机构：

[1] Univ Electrocommun, Dept Informat & Commun Engn, Lab Informat Photon & Wave Signal Proc, Chofu, Tokyo 1828585, Japan

[2] Riso Natl Lab, Opt & Plasma Res Dept, DK-4000 Roskilde, Denmark

来源：

OPTICS EXPRESS | 2006年 / 14卷 / 01期

关键词：

D O I：

10.1364/OPEX.14.000120

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

As an alternative to correlation-based techniques widely used in conventional speckle metrology, we propose a new technique that makes use of phase singularities in the complex analytic signal of a speckle pattern as indicators of local speckle displacements. The complex analytic signal is generated by vortex filtering the speckle pattern. Experimental results are presented that demonstrate the validity and the performance of the proposed optical vortex metrology with nano-scale resolution. (c) 2006 Optical Society of America.

引用

页码：120 / 127

页数：8

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