Monolithic Pixel Detectors in Silicon On Insulator Technology

被引：0

作者：

Bisello, Dario ^{[1
]}

机构：

[1] Univ Padua, Dipartimento Fis, I-35131 Padua, Italy

来源：

XXXV BRAZILIAN WORKSHOP ON NUCLEAR PHYSICS | 2013年 / 1529卷

关键词：

Semiconductor Detectors; Monolithic Pixel Detectors; SOI Technology; SOI TECHNOLOGY; SENSOR;

D O I：

10.1063/1.4804100

中图分类号：

O57 [原子核物理学、高能物理学];

学科分类号：

070202 ;

摘要：

Silicon On Insulator (SOI) is becoming an attractive technology to fabricate monolithic pixel detectors. The possibility of using the depleted resistive substrate as a drift collection volume and to connect it by means of vias through the buried oxide to the pixel electronic makes this kind of approach interesting both for particle and photon detection. In this paper I report the results obtained in the development of monolithic pixel detectors in an SOI technology by a collaboration between groups from the University and INFN of Padova (Italy) and the LBNL and the SCIPP at UCSC (USA).

引用

页码：117 / 123

页数：7

共 13 条

[1] Developments of SOI monolithic pixel detectors [J].

Arai, Y. ;

Miyoshi, T. ;

Unno, Y. ;

Tsuboyama, T. ;

Terada, S. ;

Ikegami, Y. ;

Kohriki, T. ;

Tauchi, K. ;

Ikemoto, Y. ;

Ichimiya, R. ;

Ikeda, H. ;

Hara, K. ;

Miyake, H. ;

Kochiyama, M. ;

Sega, T. ;

Hanagaki, K. ;

Hirose, M. ;

Hatsui, T. ;

Kudo, T. ;

Hirono, T. ;

Yabashi, M. ;

Furukawa, Y. ;

Varner, G. ;

Cooney, M. ;

Hoedlmoser, H. ;

Kennedy, J. ;

Sahoo, H. ;

Battaglia, M. ;

Denes, P. ;

Vu, C. ;

Contarato, D. ;

Giubilato, P. ;

Glesener, L. ;

Yarema, R. ;

Lipton, R. ;

Deptuch, G. ;

Trimpl, M. ;

Ohno, M. ;

Fukuda, K. ;

Komatsubara, H. ;

Ida, J. ;

Okihara, M. ;

Hayashi, H. ;

Kawai, Y. ;

Ohtomo, A. .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2010, 623 (01) :186-188

[2]

Arai Y., 2006, NUCL INSTRUM METH A, VA560, P26

[3] A DAQ system for pixel detectors R&D [J].

Battaglia, M. ;

Bisello, D. ;

Contarato, D. ;

Giubilato, P. ;

Pantano, D. ;

Tessaro, M. .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2009, 611 (01) :105-110

[4] A monolithic pixel sensor in 0.15 μm fully depleted SOI technology [J].

Battaglia, Marco ;

Bisello, Dario ;

Contarato, Devis ;

Denes, Peter ;

Glubilato, Piero ;

Glesener, Lindsay ;

Vu, Chinh .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2007, 583 (2-3) :526-528

[5] Characterisation of a thin fully depleted SOI pixel sensor with high momentum charged particles [J].

Battaglia, Marco ;

Bisello, Dario ;

Contarato, Devis ;

Denes, Peter ;

Giubilato, Piero ;

Mattiazzo, Serena ;

Pantano, Devis .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2012, 676 :50-53

[6] Characterisation of a Thin Fully Depleted SOI Pixel Sensor with Soft X-ray Radiation [J].

Battaglia, Marco ;

Bisello, Dario ;

Celestre, Richard ;

Contarato, Devis ;

Denes, Peter ;

Mattiazzo, Serena ;

Tindall, Craig .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2012, 674 :51-54

[7] Characterisation of a pixel sensor in 0.20 μm SOI technology for charged particle tracking [J].

Battaglia, Marco ;

Bisello, Dario ;

Contarato, Devis ;

Denes, Peter ;

Giubilato, Piero ;

Mattiazzo, Serena ;

Pantano, Devis ;

Zalusky, Sarah .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2011, 654 (01) :258-265

[8] Monolithic pixel sensors in deep-submicron SOI technology with analog and digital pixels [J].

Battaglia, Marco ;

Bisello, Dario ;

Contarato, Devis ;

Denes, Peter ;

Giubilato, Piero ;

Glesener, Lindsay ;

Mattiazzo, Serena ;

Vu, Chinh .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2009, 604 (1-2) :380-384

[9] Marlin and LCCD - Software tools for the ILC [J].

Gaede, F .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2006, 559 (01) :177-180

[10] Tests of monolithic pixel detectors in SOI technology with depleted substrate [J].

Giubilato, Piero ;

Battaglia, Marco ;

Bisello, Dario ;

Contarato, Devis ;

Denes, Peter ;

Kim, Tae Sung ;

Mattiazzo, Serena ;

Pantano, Devis ;

Pozzobon, Nicola ;

Tindall, C. S. ;

Zalusky, Sarah .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2011, 650 (01) :184-188

← 1 2 →