Magneto-optical properties of cerium substituted yttrium iron garnet films with reduced thermal budget for monolithic photonic integrated circuits

被引:106
作者
Goto, Taichi [1 ]
Onbasli, Mehmet C. [1 ]
Ross, C. A. [1 ]
机构
[1] MIT, Dept Mat & Sci & Engn, Cambridge, MA 02139 USA
基金
美国国家科学基金会; 日本学术振兴会;
关键词
GIANT FARADAY-ROTATION; DEPOSITION;
D O I
10.1364/OE.20.028507
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Thin films of polycrystalline cerium substituted yttrium iron garnet (CeYIG) were grown on an yttrium iron garnet (YIG) seed layer on Si and Si-on-insulator substrates by pulsed laser deposition, and their optical and magneto-optical properties in the near-IR region were measured. A YIG seed layer of similar to 30 nm thick processed by rapid thermal anneal at 800 degrees C provided a virtual substrate to promote crystallization of the CeYIG. The effect of the thermal budget of the YIG/CeYIG growth process on the film structure, magnetic and magnetooptical properties was determined. (C)2012 Optical Society of America
引用
收藏
页码:28507 / 28517
页数:11
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