A new digital silicon MEMS gyroscope

被引：0

作者：

Wu, L. F. ^{[1
]}

Peng, Z. ^{[2
]}

Zhang, W. ^{[3
]}

Zhang, F. X. ^{[3
]}

机构：

[1] Beijing Univ Posts & Telecommun, Sch Elect & Engn, Beijing 100876, Peoples R China

[2] N China Inst Sci & Technol, Dept Comp, Beijing 101601, Peoples R China

[3] Beijing Univ Informat Sci & Technol, Res Ctr Sensor Technol, Beijing 100101, Peoples R China

来源：

SECOND INTERNATIONAL CONFERENCE ON SMART MATERIALS AND NANOTECHNOLOGY IN ENGINEERING | 2009年 / 7493卷

基金：

中国国家自然科学基金;

关键词：

MEMS gyroscope; pitch; yaw; angular rate;

D O I：

10.1117/12.839936

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This paper presents a new, digital silicon MEMS gyroscope, which consists of micro-sensor, signal processing circuit and micro-processor (MSC1214). The gyroscope structure allows it to achieve rolling rate, yaw angular rate and pitch angular rate of rotating carrier. That is, it can detect the attitude of a rotating carrier. The key techniques of MEMS gyroscope, including sensing construct, sensing principle, signal processing circuit design and test results are presented. The test results show that the non-linearity of the gyroscope is less than 0.5% and sensitivity of the gyroscope is 0.01 degrees/s at atmospheric pressure, measuring range of yaw (or pitch) angular rate and rolling rate of rotating carrier is from -500 degrees/s to +500 degrees/s and 0 Hz to 40 Hz, respectively.

引用

页数：7

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