共 10 条
[1]
Microhardness and structural analysis of (TI,AI)N, (Ti,Cr)N, (Ti,Zr)N and (TI,V)N films
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
2000, 18 (03)
:1038-1040
[2]
IKEDA T, 1991, THIN SOLID FILMS, V195, P99, DOI 10.1016/0040-6090(91)90262-V
[8]
WADA T, 2002, J JPN SOC POWDER POW, V49, P984
[9]
YAMADA Y, 1996, P 3 INT C PROGR CUTT, P211
[10]
Yamada Y., 1997, P 1 FRENCH GERM C HI, P486