Micro- and Nanoprinting into Solids Using Reaction-Diffusion Etching and Hydrogel Stamps

被引：27
作者：
Grzybowski, Bartosz A. [1 ,2 ]
Bishop, Kyle J. M. [1 ,2 ]
机构：
[1] Northwestern Univ, Dept Chem & Biol Engn, Evanston, IL 60208 USA
[2] Northwestern Univ, Dept Chem, Evanston, IL 60208 USA
来源：
SMALL | 2009年 / 5卷 / 01期
关键词：
hydrogels; imprinting; lithography; patterning; topography; SOFT LITHOGRAPHY;
D O I：
10.1002/smll.200800914
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Micropatterned hydrogel stamps soaked in appropriate chemical etchants can imprint various types of micro- and nanoarchitectures into metals, conductive oxides, semiconductors, glasses, and crystals. Localized etching is mediated by a reaction-diffusion process initiated from. the stamp microfeatures and gives lateral resolution down to approximately 300 nm. The method is well suited for the rapid prototyping of small-scale devices including multilevel microfluidic systems and curvilinear optical elements.
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收藏
页码：22 / 27
页数：6
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