Frequency response of atmospheric pressure gas breakdown in micro/nanogaps

被引：60

作者：

Semnani, Abbas ^{[1
]}

Venkattraman, Ayyaswamy ^{[2
]}

Alexeenko, Alina A. ^{[2
]}

Peroulis, Dimitrios ^{[1
]}

机构：

[1] Purdue Univ, Birck Nanotechnol Ctr, Sch Elect & Comp Engn, W Lafayette, IN 47907 USA

[2] Purdue Univ, Sch Aeronaut & Astronaut, W Lafayette, IN 47907 USA

来源：

APPLIED PHYSICS LETTERS | 2013年 / 103卷 / 06期

基金：

美国国家科学基金会;

关键词：

MICRON SEPARATIONS; ELECTRIC-FIELDS; MICROPLASMA; GENERATION; DISCHARGES; EMISSION;

D O I：

10.1063/1.4817978

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In this paper, we study gas breakdown in micro/nanogaps at atmospheric pressure from low RF to high millimeter band. For gaps larger than about 10 mu m, the breakdown voltage agrees with macroscale vacuum experiments, exhibiting a sharp decrease at a critical frequency, due to transition between the boundary- and diffusion-controlled regimes, and a gradual increase at very high frequencies as a result of inefficient energy transfer by field. For sub-micron gaps, a much lower breakdown is obtained almost independent of frequency because of the dominance of field emission. (C) 2013 AIP Publishing LLC.

引用

页数：4

共 28 条

[1] Microwave breakdown in resonators and filters [J].

Anderson, D ;

Jordan, U ;

Lisak, M ;

Olsson, T ;

Åhlander, M .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1999, 47 (12) :2547-2556

[2] PARTICLE-IN-CELL CHARGED-PARTICLE SIMULATIONS, PLUS MONTE-CARLO COLLISIONS WITH NEUTRAL ATOMS, PIC-MCC [J].

BIRDSALL, CK .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 1991, 19 (02) :65-85

[3] Plasma physics and related challenges of millimeter-wave-to-terahertz and high power microwave generation [J].

Booske, John H. .

PHYSICS OF PLASMAS, 2008, 15 (05)

[4] HIGH-FREQUENCY GAS-DISCHARGE BREAKDOWN [J].

BROWN, SC .

PROCEEDINGS OF THE INSTITUTE OF RADIO ENGINEERS, 1951, 39 (12) :1493-1501

[5] Electrical breakdown phenomena for devices with micron separations [J].

Chen, Ching-Heng ;

Yeh, J. Andrew ;

Wang, Pei-Jen .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2006, 16 (07) :1366-1373

[6] Electron emission in intense electric fields [J].

Fowler, RH ;

Nordheim, L .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-CONTAINING PAPERS OF A MATHEMATICAL AND PHYSICAL CHARACTER, 1928, 119 (781) :173-181

[7] A mathematical model of the modified Paschen's curve for breakdown in microscale gaps [J].

Go, David B. ;

Pohlman, Daniel A. .

JOURNAL OF APPLIED PHYSICS, 2010, 107 (10)

[8] Split-ring resonator microplasma: microwave model, plasma impedance and power efficiency [J].

Iza, F ;

Hopwood, J .

PLASMA SOURCES SCIENCE & TECHNOLOGY, 2005, 14 (02) :397-406

[9] Low-pressure gas breakdown in dual-frequency RF electric fields in nitrogen [J].

Lisovskiy, V. ;

Booth, J.-P. ;

Landry, K. ;

Douai, D. ;

Cassagne, V. ;

Yegorenkov, V. .

EPL, 2007, 80 (02)

[10] Low-pressure gas breakdown in uniform dc electric field [J].

Lisovskiy, VA ;

Yakovin, SD ;

Yegorenkov, VD .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2000, 33 (21) :2722-2730

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