共 50 条
- [8] Vacuum gauging with complementary metal-oxide-semiconductor microsensors Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1995, 13 (03): : 503 - 508
- [9] VACUUM GAUGING WITH COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR MICROSENSORS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (03): : 503 - 508