Ultrathin Silicon-on-Insulator Grating Couplers

被引：29

作者：

He, Li ^{[1
,2
]}

He, Yanling

Pomerene, Andrew ^{[3
]}

Hill, Craig ^{[3
]}

Ocheltree, Stewart ^{[3
]}

Baehr-Jones, Tom ^{[1
]}

Hochberg, Michael ^{[1
,4
]}

机构：

[1] Univ Delaware, Dept Elect & Comp Engn, Newark, DE 19716 USA

[2] Univ Washington, Dept Elect Engn, Seattle, WA 98105 USA

[3] BAE Syst, Semicond Technol Ctr, Manassas, VA 20110 USA

[4] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 119077, Singapore

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2012年 / 24卷 / 24期

关键词：

Grating coupler; silicon photonics; ultrathin silicon waveguide;

D O I：

10.1109/LPT.2012.2225830

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We demonstrate a novel grating coupler fabricated on a silicon-on-insulator (SOI) wafer operating at 1550 nm, based on an ultrathin 50-nm silicon geometry. The devices are fabricated in a CMOS-compatible process with a single etch step. A low insertion loss of -3.7 dB is achieved. We also calculate the backreflection loss to be -14 dB. The devices are likely to be useful in terms of light coupling between optical fibers and ultrathin silicon waveguides.

引用

页码：2247 / 2249

页数：3

共 50 条

[31] Dimensional variation tolerant silicon-on-insulator directional couplers
Mikkelsen, Jared C.
Sacher, Wesley D.
Poon, Joyce K. S.
OPTICS EXPRESS, 2014, 22 (03): : 3145 - 3150
[32] Integrated tapered MMI couplers in the silicon-on-insulator technology
Wei, HZ
Yu, JZ
Liu, ZG
Ma, HZ
Li, GH
Zhang, XF
Wang, LC
CLEO(R)/PACIFIC RIM 2001, VOL II, TECHNICAL DIGEST, 2001, : 246 - 247
[33] Fabricating and inspecting ultrathin silicon-on-insulator wafers
Maleville, C
Cheung, L
Mueller, D
MICRO, 2003, 21 (08): : 57 - +
[34] Dopant profiling in ultrathin silicon-on-insulator layers
Bennett, J
Tichy, RS
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (01): : 332 - 335
[35] Field effect nanotransistor on ultrathin silicon-on-insulator
Nastaushev, Yu. V.
Gavrilova, T. A.
Kachanova, M. M.
Naumova, O. V.
Antonova, I. V.
Popov, V. P.
Litvin, L. V.
Sheglov, D. V.
Latyshev, A. V.
Aseev, A. L.
International Journal of Nanoscience, Vol 3, Nos 1 and 2, 2004, 3 (1-2): : 155 - 160
[36] Ultrathin silicon-on-insulator vertical tunneling transistor
Zaslavsky, A
Aydin, C
Luryi, S
Cristoloveanu, S
Mariolle, D
Fraboulet, D
Deleonibus, S
APPLIED PHYSICS LETTERS, 2003, 83 (08) : 1653 - 1655
[37] Seebeck Coefficient of Ultrathin Silicon-on-Insulator Layers
Salleh, Faiz
Asai, Kiyosumi
Ishida, Akihiro
Ikeda, Hiroya
APPLIED PHYSICS EXPRESS, 2009, 2 (07)
[38] An Electromechanical Tunable Grating on Silicon-on-Insulator Platform
Gao, Xumin
Shi, Zheng
Li, Xin
He, Shumin
Zhu, Hongbo
Wang, Yongjin
MICRO-NANO TECHNOLOGY XV, 2014, 609-610 : 1277 - 1282
[39] A novel design of grating couplers for efficient broadband coupling between silicon-on-insulator nanophotonic waveguides and fibres
Yu, HJ
Yu, JZ
CHINESE PHYSICS LETTERS, 2005, 22 (11) : 2865 - 2868
[40] Arrayed waveguide grating demultiplexers in silicon-on-insulator
Pearson, MRT
Bezinger, A
Delâge, A
Fraser, JW
Janz, S
Jessop, PE
Xu, DX
SILICON-BASED OPTOELECTRONICS II, 2000, 3953 : 11 - 18

← 1 2 3 4 5 →