Formation and transformation of embedded GaN nanocrystals

被引:12
|
作者
Wood, A. W. [1 ]
Collino, R. R. [2 ]
Wang, P. T. [2 ]
Wang, Y. Q. [3 ]
Goldman, R. S. [1 ,2 ]
机构
[1] Univ Michigan, Dept Phys, Ann Arbor, MI 48109 USA
[2] Univ Michigan, Dept Mat Sci & Engn, Ann Arbor, MI 48109 USA
[3] Los Alamos Natl Lab, Mat Sci & Technol Div, Los Alamos, NM 87545 USA
关键词
IMMERSION ION-IMPLANTATION; NITRIDATION; GAAS; SURFACE; PLASMA; NANOSTRUCTURES; BEAMS; N+;
D O I
10.1063/1.4714918
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have investigated the nucleation, growth and transformation of nitride nanostructures synthesized by nitrogen ion implantation into GaAs, followed by thermal annealing. High energy implantation into GaAs thin films results in the formation of a nitrogen-rich amorphous layer, with crystalline remnants. Subsequent annealing leads to the formation of polycrystalline zincblende and/or wurtzite GaN nanocrystals. We discuss the role of annealing time and temperature on nanocrystal nucleation and growth and present a time-temperature-transformation diagram that describes the nucleation of zincblende GaN and its subsequent transformation to wurtzite GaN. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4714918]
引用
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页数:4
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