Characterization of stacked sol-gel films: Comparison of results derived from scanning electron microscopy, UV-vis spectroscopy and ellipsometric porosimetry

被引：14

作者：

Bittner, Andreas ^{[2
]}

Schmitt, Angelika ^{[1
]}

Jahn, Rainer ^{[1
]}

Loebmann, Peer ^{[1
]}

机构：

[1] Fraunhofer Inst Silicatforsch, D-97082 Wurzburg, Germany

[2] Univ Wurzburg, Lehrstuhl Chem Technol Mat Synth, D-97070 Wurzburg, Germany

来源：

THIN SOLID FILMS | 2012年 / 520卷 / 06期

关键词：

Sol-gel deposition; Thin films; Ellipsometric porosimetry; Titanium dioxide; Magnesium fluoride; Scanning electron microscopy; TIO2; THIN-FILMS; OPTICAL-PROPERTIES; POROSITY;

D O I：

10.1016/j.tsf.2011.09.021

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

TiO2/MgF2 bi-layers were prepared by sol-gel processing in both stacking sequences. Films were characterized by scanning electron microscopy. UV-vis spectrometry, and ellipsometric porosimetry. The results obtained by the different methods are compared. The validity and limitations of the respective techniques are discussed with special focus on film porosity and the interface between the TiO2 and MgF2 material. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：1880 / 1884

页数：5

共 16 条

[1]

[Anonymous], 2007, DIELECTRIC FILMS ADV, DOI [DOI 10.1002/9780470017944, 10.1002/9780470017944]

[2] Determination of pore size distribution in thin films by ellipsometric porosimetry [J].

Baklanov, MR ;

Mogilnikov, KP ;

Polovinkin, VG ;

Dultsev, FN .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (03) :1385-1391

[3] TiO2 thin films on soda-lime and borosilicate glass prepared by sol-gel processing: influence of the substrates [J].

Bittner, Andreas ;

Jahn, Rainer ;

Loebmann, Peer .

JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2011, 58 (02) :400-406

[4] Densification and microstructural evolution of TiO2 films prepared by sol-gel processing [J].

Bockmeyer, Matthias ;

Loebmann, Peer .

CHEMISTRY OF MATERIALS, 2006, 18 (18) :4478-4485

[5] Microstructure of sol-gel derived TiO2 thin films characterized by atmospheric ellipsometric porosimetry [J].

Bockmeyer, Matthias ;

Herbig, Bettina ;

Loebmann, Peer .

THIN SOLID FILMS, 2009, 517 (05) :1596-1600

[6] Porosity and mechanical properties of mesoporous thin films assessed by environmental ellipsometric porosimetry [J].

Boissiere, C ;

Grosso, D ;

Lepoutre, S ;

Nicole, L ;

Bruneau, AB ;

Sanchez, C .

LANGMUIR, 2005, 21 (26) :12362-12371

[7]

Born M., 1987, Principles of Optics

[8] Design and simulation of antireflection coating systems for optoelectronic devices: Application to silicon solar cells [J].

Bouhafs, D ;

Moussi, A ;

Chikouche, A ;

Ruiz, JM .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1998, 52 (1-2) :79-93

[9] Ellipsometry porosimetry (EP): Thin film porosimetry by coupling an adsorption setting with an optical measurement, highlights on diffusion results [J].

Bourgeois, A. ;

Turcant, Y. ;

Walsh, Ch. ;

Defranoux, Ch. .

APPLIED SURFACE SCIENCE, 2009, 256 (03) :S26-S29

[10]

Hasan M.M., 2008, International Journal of Chemical and Biological Engineering, V1, P92

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