Effect of growth temperature and coating cycles on structural, electrical, optical properties and stability of ITO films deposited by magnetron sputtering

被引：28
作者：
Xu, Jiwen [1 ,2 ]
Yang, Zupei [1 ]
Wang, Hua [2 ]
Xu, Huarui [2 ]
Zhang, Xiaowen [2 ]
机构：
[1] Shaanxi Normal Univ, Sch Mat Sci & Engn, Xian 710062, Peoples R China
[2] Guilin Univ Elect Technol, Sch Mat Sci & Engn, Guilin 541004, Peoples R China
来源：
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | 2014年 / 21卷
基金：
中国国家自然科学基金;
关键词：
ITO; Stability; Growth temperature; Coating cycles; TIN OXIDE-FILMS; THIN-FILMS; SUBSTRATE-TEMPERATURE; DC; TRANSPARENT; RESISTIVITY; MORPHOLOGY; PRESSURE; TARGET;
D O I：
10.1016/j.mssp.2014.01.007
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The effects of growth temperature, coating cycles on the structure, electrical and optical properties of ITO films were investigated, and the stability under high temperature, high temperature & high humidity and alkaline environments was focused. With increasing the growth temperature, the crystalline phase transforms from amorphous to crystalline. The surface morphology shows flat and dense structure. The thickness, sheet resistance and resistivity firstly decrease and then increase, and the optimal sheet resistance and resistivity is 7.6 Omega/sq and 1.1 x 10(-4) Omega cm. The average visible transmittance of the ITO films and ITO glass exceeds 85% and 80%. The band gap increases from 3.75 eV to 3.95 eV. The electrical and optical properties of the ITO films are very stable after eight coating cycles. The growth temperature significantly affects the change rate of sheet resistance under high temperature, high temperature & high humidity and alkaline environments. However, the change rate of sheet resistance is stable and sight for eight coating cycles. (C) 2014 Published by Elsevier Ltd.
引用
收藏
页码：104 / 110
页数：7
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