Optical properties of photoresist in the terahertz range

被引:3
作者
Wang, Yinping
Zhang, Dawei [1 ]
Tao, Chunxian
Hong, Ruijin
Zhuang, Songlin
机构
[1] Univ Shanghai Sci & Technol, Engn Res Ctr Opt Instrument & Syst, Minist Educ, Shanghai 200093, Peoples R China
基金
中国国家自然科学基金;
关键词
Photoresist; Terahertz; Optical properties; Terahertz time-domain spectroscopy;
D O I
10.1016/j.spmi.2013.05.018
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
To meet the urgent demand for terahertz band materials with the development of terahertz devices, we have identified the refractive index, absorption coefficient, transmittance and dielectric constants of photoresist from 0.25 to 1.0 THz for it is no any reactions in the THz band. The absorption coefficient is less than 3 m(-1). The refractive index of the unexposed sample and exposed sample range from 1.71-1.82 and 1.68-1.76, with the transmittance ranges of 81-92% and 77-89.5%, respectively. The results suggested that photoresist could be good candidate materials for terahertz photon devices. The new applications of photoresist were opened up and the THz material databases were enriched by this work. (c) 2013 Published by Elsevier Ltd.
引用
收藏
页码:606 / 611
页数:6
相关论文
共 15 条
[1]   Nucleophilicity toward ketenes: Rate constants for addition of amines to aryl ketenes in acetonitrile solution [J].
de Lucas, NC ;
Netto-Ferreira, JC ;
Andraos, J ;
Scaiano, JC .
JOURNAL OF ORGANIC CHEMISTRY, 2001, 66 (15) :5016-5021
[2]   CHARACTERIZATION OF POSITIVE PHOTORESIST [J].
DILL, FH ;
HORNBERGER, WP ;
HAUGE, PS ;
SHAW, JM .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1975, ED22 (07) :445-452
[3]   THz imaging and sensing for security applications - explosives, weapons and drugs [J].
Federici, JF ;
Schulkin, B ;
Huang, F ;
Gary, D ;
Barat, R ;
Oliveira, F ;
Zimdars, D .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2005, 20 (07) :S266-S280
[4]   Materials for terahertz science and technology [J].
Ferguson, B ;
Zhang, XC .
NATURE MATERIALS, 2002, 1 (01) :26-33
[5]   Terahertz time-domain spectroscopy and imaging of artificial RNA [J].
Fischer, BM ;
Hoffmann, M ;
Helm, H ;
Wilk, R ;
Rutz, F ;
Kleine-Ostmann, T ;
Koch, M ;
Jepsen, PU .
OPTICS EXPRESS, 2005, 13 (14) :5205-5215
[6]  
[高英新 Gao Yingxin], 2004, [感光科学与光化学, Photographic Science and Photochemistry], V22, P33
[7]  
Jin YS, 2006, J KOREAN PHYS SOC, V49, P513
[8]   Generation of high-power terahertz pulses in a prism [J].
Johnston, MB ;
Whittaker, DM ;
Dowd, A ;
Davies, AG ;
Linfield, EH ;
Li, X ;
Ritchie, DA .
OPTICS LETTERS, 2002, 27 (21) :1935-1937
[9]   Preparation and properties of nano-silica modified negative acrylate photoresist [J].
Lee, Chih-Kang ;
Don, Trong-Ming ;
Lai, Wei-Chi ;
Chen, Chin-Chung ;
Lin, Dar-Jong ;
Cheng, Liao-Ping .
THIN SOLID FILMS, 2008, 516 (23) :8399-8407
[10]  
Li Ying, 2011, J APPL PHYS, V110